Vacuum cathode arc ion coating is abbreviated as vacuum arc coating. If two or more vacuum arc evaporation sources (referred to as arc sources) are used, it is called multi arc ion coating or multi arc coating. It is a vacuum ion coating technology that uses vacuum arc discharge for evaporation sources. Unlike the hot electron arc of hollow cathode discharge, its arc form is the formation of cathode arc spots on the surface of the cold cathode.
The characteristics of vacuum cathode arc ion coating are:
(1) The evaporation source is a solid cathode target, which directly generates plasma from the cathode target source without the need for a molten pool. The arc target source can be arranged in any direction and multiple sources to ensure uniform coating.
(2) The equipment structure is relatively simple, without the need for working gas or auxiliary ionization methods. The arc target source is not only an evaporation source for the cathode material, but also an ion source; During reactive deposition, only reactive gas exists, and the atmosphere is controlled using a simple full pressure control.
(3) The ionization rate is high, generally reaching 60%~80%, and the deposition rate is high.
(4) The incident ion energy is high, and the film/substrate bonding force of the deposited film is good.
(5) Using a low voltage power supply for safe operation.
(6) It can deposit metal films, alloy films, react and synthesize various compound films (ammonia compounds, carbides, oxides), and even synthesize DLC films, C-N films, etc. Its disadvantage is that during deposition, tiny droplets of liquid are splashed from the target surface, which condense in the coated film layer and increase the roughness of the film layer. Currently, many effective methods have been studied to reduce and eliminate these micro droplets.
Vacuum arc ion coating technology has been widely used to coat superhard protective coatings for tools and molds. Film systems include TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, etc. Coating products include tools, molds, etc. In terms of imitation gold and color decorative protective coatings, film systems include TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-O-N, T-O-N-C, ZrCN, Zr-O-N, etc. Color film systems include gun black, black, purple, brown, blue Green gray, etc.
Multi arc ion coating has a wide range of applications and strong practicality, especially in coating decorative and wear-resistant hard film layers on the surfaces of materials such as cutting tools, molds, and stainless steel plates.
Post time: Aug-17-2023