Halaye na sputtering shafi fina-finai

① Kyakkyawan sarrafawa da maimaitawa na kauri na fim

Ko ana iya sarrafa kaurin fim ɗin a ƙayyadaddun ƙima ana kiransa kauri mai sarrafa fim.Za'a iya maimaita kauri na fim ɗin da ake buƙata sau da yawa, wanda ake kira kauri fim ɗin maimaitawa.Saboda fitarwa na halin yanzu da manufa na yanzu na murfin sputtering na iya sarrafa daban.Saboda haka, kauri na sputtered fim ne controllable, da kuma fim da aka ƙaddara kauri za a iya ajiye a dogara.Bugu da ƙari, suturar sputter na iya samun fim tare da kauri iri ɗaya a kan babban farfajiya.

② Ƙarfin mannewa tsakanin fim da substrate

Ƙarfin atom ɗin da aka watsar yana da umarni 1-2 na girma sama da na atom ɗin da aka ƙafe.Juyin makamashi na atom ɗin da aka watsar da makamashi mai ƙarfi da aka ajiye akan mashin ɗin ya fi na atom ɗin da aka ƙafe, wanda ke haifar da zafi mai yawa kuma yana haɓaka mannewa tsakanin atom ɗin da aka fantsama da ƙasa.Bugu da ƙari, wasu ƙwayoyin zarra masu ƙarfi masu ƙarfi suna samar da nau'ikan allura daban-daban, suna samar da Layer na pseudodiffusion akan ƙasa.Bugu da ƙari, ana tsabtace substrate koyaushe kuma ana kunna shi a cikin yankin plasma yayin aiwatar da fim ɗin, wanda ke kawar da atom ɗin sputtering tare da mannewa mai rauni, kuma yana tsarkakewa da kunna saman substrate.Sabili da haka, fim ɗin sputtered yana da ƙarfi adhesion zuwa substrate.

③ Za a iya shirya sabon fim ɗin abin da ya bambanta da manufa

Idan an shigar da iskar gas mai amsawa yayin watsawa don sanya shi amsa tare da manufa, ana iya samun sabon fim ɗin abin da ya bambanta da abin da ake nufi.Alal misali, ana amfani da silicon a matsayin maƙasudin sputtering, kuma oxygen da argon ana saka su a cikin dakin da ba a so.Bayan sputtering, SiOz insulating fim za a iya samu.Yin amfani da titanium a matsayin maƙasudin sputtering, nitrogen da argon ana saka su a cikin ɗaki tare, kuma ana iya samun fim ɗin TiN mai kama da zinari bayan sputtering.

④ Babban tsabta da ingancin fim

Tun da babu wani abu mai banƙyama a cikin na'urar shirye-shiryen fina-finai na sputtering, abubuwan da ke tattare da kayan aikin zafi ba za a haɗe su a cikin fim ɗin fim ɗin sputtering ba.Rashin hasara na suturar sputtering shine cewa saurin samar da fim ɗin yana da hankali fiye da na murfin evaporation, yanayin zafin jiki ya fi girma, yana da sauƙi a shafa shi da ƙarancin iskar gas, kuma tsarin na'urar ya fi rikitarwa.

Guangdong Zhenhua, wani masana'anta ne ya buga wannan labarininjin shafa kayan aiki