Tsarin murfin cathode ion mai zurfi shine kamar haka:
1. Sanya Chin ingots a cikin rushewa.
2. Hauwa da workpiece.
3, Bayan evacuating zuwa 5 × 10-3Pa, argon gas da aka gabatar a cikin shafi jam'iyya daga azurfa tube, da kuma injin matakin ne a kusa da 100Pa.
4. Kunna ikon son zuciya.
5, Bayan kunna baka ikon ƙone da m cathode sallama.The haske sallama ne generated a cikin button tube, Fitar irin ƙarfin lantarki ne 800 ~ 1000V, The baka-kiwon halin yanzu ne 30 ~ 50A.Due ga m cathode sakamako na haske fitarwa, Babban haske mai yawa na halin yanzu, Babban yawa na ions bera a cikin bututun azurfa yana jefa bangon bututun vantage, Sanya bangon bututu da sauri yayi zafi har zuwa fitar da kwararar lantarki, yanayin fitarwa daga fitarwa mai haske kwatsam canji zuwa Arc fitarwa, Voltage ne 40 ~ 70V, A halin yanzu ne 80 ~ 300A. Azurfa tube zafin jiki kai sama da 2300K, Incandescent, Emits wani babban yawa rafi na baka electrons daga tube, da kuma harbi zuwa anode.
6. Daidaita injin level.The injin matakin ga haske sallama daga m cathode gun ne game da 100 Pa, Kuma injin digiri na shafi ne 8 × 10-1 ~ 2Pa.Saboda haka, Bayan ƙonewa na baka sallama, Rage mai shigowa argon iskar gas da wuri-wuri, Daidaita matakin injin zuwa kewayon da ya dace da sutura.
7, Titanium plated tushe Layer.Electron ya kwarara uwa da anodically ruguje Chin karfe ingot, Canja wurin motsi makamashi zuwa thermal makamashi, evaporation na Chin karfe da dumama, tururi atoms kai workpiece ta samar da wani titanium fim.
8, Deposition na TiN.Nitrogen gas aka kawota zuwa shafi jam'iyya, Nitrogen gas da kuma evaporated atoms suna ionized cikin nitrogen da titanium ions.Above da crucible, Babban yiwuwa na inelastic karo na titanium tururi atoms da m kõguna na low-makamashi electrons, The karfe dissociation kudi ne kamar yadda high as 20% ~ 40%, Titanium ions ne mafi kusantar su amsa chemically tare da dauki gas nitrogen, Deposition don samun wani nitride mantle film Layer. The m cathode gun ne duka a vaporization source, Wani tushen. na ionization.Lokacin shafi, A halin yanzu na electromagnetic nada a kusa da crucible ya kamata kuma a gyara, mayar da hankali da electron katako zuwa tsakiyar rugujewa, Saboda haka, da ikon yawa na electron kwarara yana karuwa.
9, Power Off.Bayan fim kauri kai predetermined film kauri, Kashe baka ikon wadata, Bias samar da wutar lantarki da iska wadata.
Lokacin aikawa: Jul-08-2023