Kan aiwatar da cathodic baka tushen ion shafi ne m guda da sauran shafi fasahar, da kuma wasu ayyuka kamar installing workpieces da vacuuming ba a sake maimaita.
1.Bombardment tsaftacewa na workpieces
Kafin shafa, an gabatar da iskar argon a cikin ɗakin rufi tare da injin 2 × 10-2Pa.
Kunna wutar lantarki mai nuna son zuciya, tare da sake zagayowar aiki na 20% da nuna son kai na 800-1000V.
Lokacin da aka kunna wutar baka, ana haifar da filaye mai sanyi na arc haske, wanda ke fitar da adadi mai yawa na electron current da titanium ion daga tushen arc, yana samar da plasma mai girma.The titanium ion accelerates ta allura a cikin workpiece karkashin korau high son zuciya matsa lamba shafi workpiece, bombarding da sputtering da saura gas da pollutant adsorbed a saman da workpiece, da kuma tsaftacewa da tsarkakewa surface na workpiece;A lokaci guda, da chlorine gas a cikin shafi ɗakin da aka ionized da electrons, da kuma argon ions kara da bombardment na workpiece surface.
Sabili da haka, tasirin tsabtace bam yana da kyau.Kimanin minti 1 kawai na tsabtace bam zai iya tsaftace kayan aikin, wanda ake kira "babban bam na baka".Saboda babban taro na titanium ions, idan an yi amfani da ƙaramin tushen baka don bombard da tsaftace kayan aiki na dogon lokaci, zafin jiki na aikin yana da wuyar yin zafi, kuma gefen kayan aiki na iya zama taushi.A cikin samarwa gabaɗaya, ana kunna ƙananan tushen baka ɗaya bayan ɗaya daga sama zuwa ƙasa, kuma kowace ƙaramar tushen baka tana da lokacin tsaftace bam na kusan minti 1.
(1) Shafi titanium kasa Layer
Domin inganta mannewa tsakanin fim da substrate, wani Layer na tsantsa na titanium substrate yawanci mai rufi kafin a rufe titanium nitride.Daidaita injin matakin zuwa 5 × 10-2-3 × 10-1Pa, daidaita aikin bias ƙarfin lantarki zuwa 400-500V, da daidaita tsarin aikin bugun jini na wutar lantarki zuwa 40% ~ 50%.Har yanzu ana kunna ƙananan maɓuɓɓugan baka ɗaya bayan ɗaya don haifar da fitarwar filin sanyi mai sanyi.Sakamakon raguwa a cikin ƙarancin wutar lantarki mara kyau na aikin aikin, ƙarfin ions na titanium yana raguwa.Bayan kai ga workpiece, sputtering sakamako ne kasa da azuzuwan sakamako, da kuma Titanium mika mulki Layer aka kafa a kan workpiece inganta bonding karfi tsakanin titanium nitride wuya fim Layer da substrate.Wannan tsari kuma shine tsarin dumama kayan aikin.Lokacin da aka fitar da maƙasudin titanium mai tsafta, hasken da ke cikin plasma shuɗi ne azure.
1.Ammoniated kwano wuya fim shafi
Daidaita injin injin zuwa 3 × 10-1-5Pa, daidaita workpiece bias irin ƙarfin lantarki zuwa 100-200V, da kuma daidaita aikin sake zagayowar na bugun jini son zuciya da wutar lantarki zuwa 70% ~ 80%.Bayan an gabatar da nitrogen, titanium shine haɗuwa tare da arc fitarwa plasma don saka fim ɗin titanium nitride.A wannan lokacin, hasken plasma a cikin ɗakin datti yana jan ceri.Idan C2H2, O2, da sauransu ana gabatar da su, TiCN, TiO2, da sauransu za a iya samun yadudduka na fim.
Guangdong Zhenhua ne ya fitar da wannan labarin, ainjin shafa injin injin
Lokacin aikawa: Juni-01-2023