1, Samar da mahadi na ƙarfe akan farfajiyar manufa
A ina aka kafa mahadi a cikin tsarin samar da fili daga wani karfen da aka yi niyya ta hanyar aiwatar da sputtering?Tunda sinadarin sinadaran da ke tsakanin barbashi na iskar gas mai amsawa da atom din da aka yi niyya yana samar da kwayoyin halitta, wanda yawanci exothermic ne, zafin dauki dole ne ya sami hanyar da za a iya fita, in ba haka ba sinadaran sinadaran ba zai iya ci gaba ba.A karkashin yanayi mara kyau, canja wurin zafi tsakanin iskar gas ba zai yiwu ba, don haka halayen sinadaran dole ne ya faru a kan wani wuri mai ƙarfi.Reaction sputtering yana haifar da mahadi akan filaye da aka yi niyya, saman ƙasa, da sauran filayen tsarin.Samar da mahadi a saman ƙasa shine makasudin, samar da mahadi a kan sauran sassan tsarin ɓarna ne na albarkatu, kuma samar da mahadi a kan abin da ake niyya yana farawa azaman tushen ƙwayoyin zarra kuma ya zama shinge ga ci gaba da samar da ƙarin ƙwayoyin zarra.
2, Abubuwan tasiri na gubar manufa
Babban abin da ya shafi gubar da aka yi niyya shine rabon iskar gas da kuma iskar gas, yawan iskar gas zai haifar da guba.Reactive sputtering tsari ne da za'ayi a cikin manufa surface sputtering tashar yankin ya bayyana da za a rufe da dauki fili ko dauki fili da aka tube da kuma sake fallasa karfe surface.Idan adadin tsararrun mahadi ya fi yawan adadin fili, yankin ɗaukar hoto yana ƙaruwa.A wani takamaiman iko, adadin iskar gas da ke cikin haɓakar mahalli yana ƙaruwa kuma adadin haɓakar fili yana ƙaruwa.Idan adadin iskar gas ya ƙaru da yawa, yankin ɗaukar hoto yana ƙaruwa.Kuma idan ba za a iya daidaita yanayin kwararar iskar gas a cikin lokaci ba, ba a rage yawan karuwar mahaɗar fili ba, kuma tashar sputtering za ta ƙara rufe ta da fili, lokacin da maƙasudin sputtering ya cika da fili, manufa ita ce. gaba daya guba.
3, Al'amarin gubar manufa
(1) tabbataccen tarin ion: lokacin da gubar da aka yi niyya, za a samar da Layer na fim mai hana ruwa a saman da aka yi niyya, ions masu kyau sun isa saman maƙasudin cathode saboda toshewar rufin insulating.Ba kai tsaye shiga cikin cathode manufa surface, amma tara a kan manufa surface, sauki don samar da sanyi filin zuwa baka fitarwa - arcing, sabõda haka, cathode sputtering ba zai iya ci gaba.
(2) anode bacewar: a lokacin da manufa guba, grounded injin jam'iyya bango kuma deposited insulating film, kai da anode electrons ba zai iya shiga da anode, samuwar anode bacewar sabon abu.
4, Bayanin jiki na gubar manufa
(1) Gabaɗaya, madaidaicin iskar lantarki ta biyu na mahaɗin ƙarfe ya fi na ƙarfe.Bayan gubar da aka yi niyya, saman abin da ake nufi shi ne duk wani abu na ƙarfe, kuma bayan ions sun jefa bam ɗin, adadin electrons ɗin da aka saki yana ƙaruwa, wanda ke inganta haɓakar sararin samaniya da rage tasirin plasma, wanda ke haifar da ƙananan ƙarfin sputtering.Wannan yana rage yawan sputtering.Gabaɗaya ƙarfin lantarki na sputtering na magnetron sputtering yana tsakanin 400V-600V, kuma lokacin da gubar manufa ta faru, ƙarfin ƙarfin sputtering yana raguwa sosai.
(2) Metal manufa da fili manufa asalin sputtering kudi ne daban-daban, gaba daya sputtering coefficient na karfe ya fi sputtering coefficient na fili, don haka sputtering kudi ne low bayan manufa guba.
(3) Ingantacciyar isashshen iskar iskar iskar iskar gas ta asali tana ƙasa da ingancin iskar iskar gas ɗin da ba ta dace ba, don haka ƙimar sputtering ɗin gabaɗaya tana raguwa bayan adadin iskar gas ɗin yana ƙaruwa.
5, Magani don gubar manufa
(1) Ɗauki matsakaiciyar wutar lantarki ko mitar rediyo.
(2) Amince da rufaffiyar madauki na shigar da iskar gas.
(3) Dauki tagwayen hari
(4) Sarrafa canjin yanayin shafi: Kafin rufewa, ana tattara tasirin tasirin hysteresis na guba mai guba don sarrafa kwararar iska mai shigowa a gaban samar da gubar manufa don tabbatar da cewa tsari koyaushe yana cikin yanayin kafin ajiya. ƙimar ta faɗi sosai.
-An buga wannan labarin ta Guangdong Zhenhua Technology, mai kera kayan kwalliyar injin.
Lokacin aikawa: Nuwamba-07-2022