Theinjin rufe fuskainji tsari ya kasu kashi: injin evaporation shafi, injin sputtering shafi da injin ion shafi.
1. Vacuum evaporation shafi
A karkashin injin yanayin, sa kayan evaporated, irin su karfe, karfe gami, da dai sauransu sa'an nan saka su a kan substrate surface, da evaporation shafi hanya ne sau da yawa amfani da juriya dumama, sa'an nan electron katako bombardment na shafi abu, sa su. evaporated zuwa gas lokaci, sa'an nan ajiya a kan substrate surface, a tarihi, injin tururi jijiya shi ne da farko fasahar amfani da PVD hanya.
2.Sputtering shafi
A wannan lokacin ne argon (Ar) atoms ion zuwa nitrogen ions (Ar), The ions suna accelerated da karfi na lantarki filin, da kuma bombard da cathode hari wanda. An yi shi da kayan shafa, manufa za a sputtered fitar da ajiye a kan substrate surface abin da ya faru ions a sputter shafi, kullum samu ta haske fitarwa, ne a cikin kewayon 10-2pa zuwa 10Pa, Don haka sputtered barbashi ne sauki karo karo. tare da kwayoyin iskar gas a cikin ɗakin da ba a so lokacin da suke tashi zuwa ga ƙasa, yana mai da motsin motsi bazuwar kuma fim ɗin da aka ajiye cikin sauƙi ya zama uniform.
3. ion shafi
A karkashin yanayi mara amfani, A karkashin yanayin yanayi, An yi amfani da wani fasaha na ionisation na plasma zuwa partially ionise da shafi abu atom a cikin ions. ana ajiye su a kan farfajiyar ƙasa a ƙarƙashin mummunan ra'ayi mai zurfi don samar da fim na bakin ciki.
Lokacin aikawa: Maris 23-2023