Menene ka'idar Aiki na Ion Plating machine

ion shafiinji ya samo asali ne daga ka'idar da DM Mattox ya gabatar a cikin 1960s, kuma gwaje-gwaje masu dacewa sun fara a lokacin;Har zuwa 1971, Chambers da sauransu sun buga fasaha ta hanyar hasken wutar lantarki;An nuna fasahar reactive evaporation plating (ARE) a cikin rahoton Bunshah a cikin 1972, lokacin da aka samar da nau'ikan fina-finai masu wahala kamar TiC da TiN;Hakanan a cikin 1972, Smith da Molley sun karɓi fasahar cathode mara kyau a cikin tsarin sutura.Ya zuwa shekarun 1980, ion plating a kasar Sin daga karshe ya kai matakin yin amfani da masana'antu, kuma aikin da ake yi na yin rufin kamar vacuum multi-arc ion plating da arc-discharge ion plating ya bayyana a jere.

Dukkanin tsarin aikin injin ion plating shine kamar haka: na farko,famfodakin vacuum, sannanjiramatsa lamba zuwa 4X10 ⁻ ³ Pako mafi kyau, Ya zama dole don haɗa babban ƙarfin wutar lantarki da gina ƙananan zafin jiki na plasma na ƙananan ƙarancin wutar lantarki tsakanin ma'auni da evaporator.Haɗa da substrate lantarki tare da 5000V DC korau high ƙarfin lantarki don samar da wani haske fitarwa na cathode.Ana haifar da ions iskar gas kusa da wurin da ba ya da kyau.Suna shiga cikin yankin duhu na cathode kuma ana haɓaka ta hanyar wutar lantarki kuma suna jefa bam a saman ƙasa.Wannan tsarin tsaftacewa ne, sannan shigar da tsarin sutura.Ta hanyar ɗumamar bama-bamai, wasu kayan plating suna turɓaya.Yankin plasma ya shiga cikin protons, yayi karo da electrons da iskar gas maras amfani, kuma wani karamin sashi daga cikinsu yana da ionized, Wadannan ionized ionized tare da babban makamashi za su yi bombard saman fim din kuma su inganta ingancin fim din zuwa wani matsayi.

Ka'idar vacuum ion plating ita ce: a cikin dakin injin, ta yin amfani da yanayin fitarwa na iskar gas ko ɓangaren ionized na kayan da aka haɗe, a ƙarƙashin bam ɗin ion ɗin abu mai vaporized ko ion iskar gas, a lokaci guda saka waɗannan abubuwan vaporized ko masu amsawa a kan substrate. don samun siriri fim.Rufin ioninjiya haɗu da ƙurar ƙura, fasahar plasma da kuma fitar da hasken gas, wanda ba kawai inganta ingancin fim ba, amma kuma yana faɗaɗa aikace-aikacen fim ɗin.Abubuwan da ke cikin wannan tsari sune ƙaƙƙarfan diffraction, mannewa mai kyau na fim, da kayan shafa daban-daban.DM Mattox ya fara gabatar da ƙa'idar plating ion.Akwai nau'ikan ion plating da yawa.Nau'in da aka fi sani shine dumama evaporation, gami da dumama juriya, dumama wutar lantarki, dumama wutar lantarki ta plasma, dumama shigar da yawan mitoci da sauran hanyoyin dumama.