Ion beam ya taimaka fasahar sakawa

A haƙiƙa, fasahar jibgewa ta ion katako fasaha ce mai haɗaka.Dabarar jiyya ce ta haɗaɗɗun ion da ke haɗa ion implantation da fasahar fim ɗin tururi ta jiki, da sabon nau'in fasahar inganta yanayin ion katako.Bugu da ƙari ga fa'idodin da ke tattare da tururi na jiki, wannan fasaha na iya ci gaba da girma kowane fim mai kauri a ƙarƙashin ƙarin yanayi mai ƙarfi, haɓaka crystallinity da daidaitawar fim ɗin fim ɗin da mahimmanci, ƙara ƙarfin mannewa na fim ɗin Layer / substrate, inganta haɓakar ƙima. na fim din Layer, da kuma hada fina-finai masu mahimmanci tare da ma'auni na stoichiometric mai kyau a kusa da zafin jiki, ciki har da sababbin nau'o'in fina-finai waɗanda ba za a iya samu ba a dakin da zafin jiki da matsa lamba.Ion katako da aka ba da taimako ba wai kawai yana riƙe fa'idodin tsarin dasa ion ba, amma kuma yana iya rufe substrate tare da fim ɗin mabanbanta da substrate.
A cikin kowane nau'i na tururi na jiki da kuma iskar sinadarai, za'a iya ƙara saitin bindigogi na bama-bamai don samar da tsarin IBAD, kuma akwai matakai guda biyu na IBAD kamar haka, kamar yadda aka nuna a cikin Hoton:

Kamar yadda aka nuna a cikin Pic (a), ana amfani da tushen ƙafewar igiyar lantarki don haskaka saman fim ɗin tare da igiyar ion da ke fitowa daga gun ion, don haka fahimtar ion katako yana taimakawa jigo.Fa'idar ita ce, ana iya daidaita makamashin ion beam makamashi da alkibla, amma sai dai guda ɗaya ko iyakataccen allo, ko fili za a iya amfani da shi azaman tushen evaporation, kuma kowane tururi na ɓangaren gami da fili ya bambanta, wanda ya sa yana da wahala. don samun fim ɗin fim na asalin ƙashin ƙugu na asali.
Hoton (b) yana nuna ion katako sputtering-taimakawa ajiya, wanda kuma aka sani da ninki biyu ion bim sputtering adibas, a cikin abin da manufa sanya na ion katako sputtering kayan shafa, da sputtering kayayyakin da ake amfani da matsayin tushen.Yayin da ake ajiye shi a kan ma'auni, ion beam sputtering taimakon ajiya yana samuwa ta hanyar sakawa da wani tushen ion.Amfanin wannan hanya shine cewa ƙwayoyin sputtered da kansu suna da wani makamashi, don haka akwai mafi kyau adhesion tare da substrate;kowane bangare na manufa za a iya sputtered shafi, amma kuma zai iya zama dauki sputtering a cikin fim, da sauki daidaita abun da ke ciki na fim, amma da jita-jita yadda ya dace yana da ƙasa, manufa yana da tsada kuma akwai matsaloli kamar zaɓe sputtering.