Fasahar tacewa Magnetic

Ka'idar asali na na'urar tacewa na maganadisu
Tsarin tacewa na na'urar tace maganadisu don manyan barbashi a cikin bim ɗin plasma shine kamar haka:
Yin amfani da bambance-bambance tsakanin plasma da manyan ɓangarorin da ke cikin caji da ƙimar caji-zuwa taro, akwai “shamaki” (ko dai baffle ko bangon bututu mai lanƙwasa) wanda ke sanyawa tsakanin substrate da saman cathode, wanda ke toshe duk wani barbashi da ke motsawa cikin madaidaiciyar layi tsakanin cathode da substrate, yayin da ions za a iya karkatar da su ta hanyar filin maganadisu kuma su wuce ta hanyar "shamaki" zuwa ma'auni.

Ƙa'idar aiki na na'urar tacewa na maganadisu

A cikin filin maganadisu, Pe<

Pe da Pi sune Larmor radii na electrons da ions bi da bi, kuma a shine diamita na ciki na tace maganadisu.Ƙarfin Lorentz yana shafar electrons a cikin plasma kuma suna jujjuyawa tare da filin maganadisu axially, yayin da filin maganadisu yana da ƙarancin tasiri akan tarin ions saboda bambancin ions da electrons a cikin radius na Larmor.Duk da haka, lokacin da motsi na lantarki tare da axis na na'urar tace magnet, zai jawo hankalin ions tare da axial don motsi na juyawa saboda mayar da hankalinsa da kuma filin lantarki mai karfi mai karfi, kuma saurin wutar lantarki ya fi ion girma, don haka electron. ci gaba da jan ion gaba, yayin da plasma ko da yaushe yana kasancewa tsaka tsaki.Manyan barbashi suna tsaka tsaki ne ta hanyar lantarki ko kuma an caje su kaɗan, kuma ingancin ya fi girma fiye da ions da electrons, ainihin filin maganadisu ba zai shafa ba da motsin layi tare da inertia, kuma za a tace su bayan karo da bangon ciki na na'urar.
Karkashin aikin haɗin gwiwar lanƙwasa filin maganadisu da drift gradient da karo na ion-electron, ana iya karkatar da plasma a cikin na'urar tacewa na maganadisu.A cikin Samfuran ka'idodin gama gari da ake amfani da su a yau sune Morozov flux model da kuma na Davidson rigid rotor model, waɗanda ke da fasalin gama gari mai zuwa: akwai filin maganadisu wanda ke sa electrons su motsa cikin tsayayyen tsari.
Ƙarfin filin maganadisu wanda ke jagorantar motsin axial na plasma a cikin na'urar tacewa ta maganadisu yakamata ya kasance kamar haka:

Mi, Vo, da Z sune adadin ion, saurin sufuri, da adadin cajin da aka ɗauka.a shine diamita na ciki na matatar maganadisu, kuma e shine cajin lantarki.
Ya kamata a lura cewa wasu ions mafi girma na makamashi ba za a iya daure su gaba ɗaya da katako na lantarki ba.Suna iya isa bangon ciki na matatar maganadisu, suna sanya bangon ciki ya kasance mai inganci, wanda hakan ke hana ions daga ci gaba da isa bangon ciki kuma yana rage asarar plasma.
Dangane da wannan al'amari, ana iya amfani da matsi mai kyau na son zuciya ga bangon na'urar tace maganadisu don hana karon ions don inganta ingancin jigilar ion da aka yi niyya.

Rarraba na'urar tacewa na maganadisu
(1)Tsarin layi.Filin maganadisu yana aiki azaman jagora don kwararar igiyoyin ion, yana rage girman tabo na cathode da rabon gungu na macroscopic, yayin da yake haɓaka rikice-rikice a cikin plasma, yana haifar da jujjuya abubuwan tsaka tsaki zuwa ions da rage adadin macroscopic. gungu na barbashi, da sauri rage yawan manyan barbashi yayin da ƙarfin filin maganadisu ke ƙaruwa.Idan aka kwatanta da na al'ada Multi-arc ion shafi hanya, wannan tsarin na'urar ya shawo kan gagarumin raguwa a cikin yadda ya dace da wasu hanyoyin da za a iya tabbatar da gaske akai-akai saka kudi na fim yayin da rage yawan manyan barbashi da game da 60%.
(2) Tsarin nau'in lanƙwasa.Ko da yake tsarin yana da nau'i daban-daban, amma ka'idar asali iri ɗaya ce.Plasma tana motsawa ƙarƙashin aikin haɗin gwiwar filin maganadisu da filin lantarki, kuma ana amfani da filin maganadisu don iyakancewa da sarrafa plasma ba tare da karkatar da motsi tare da layin ƙarfin maganadisu ba.Kuma barbashi marasa caji za su motsa tare da linzamin kwamfuta kuma a rabu.Fina-finan da wannan tsarin na'urar ke shiryawa suna da tauri mai girma, ƙarancin ƙarancin ƙasa, ƙarancin ƙima, girman hatsi iri ɗaya, da mannen tushe mai ƙarfi na fim.Binciken XPS ya nuna cewa taurin saman ta-C fina-finai da aka lullube da irin wannan na'urar na iya kaiwa 56 GPa, don haka na'urar tsarin mai lankwasa ita ce mafi yawan amfani da ingantacciyar hanya don kawar da ɓangarorin da yawa, amma ƙimar jigilar ion mai niyya yana buƙatar zama. ya kara inganta.Na'urar tacewa ta lanƙwasa 90° ɗaya ce daga cikin na'urorin tsarin da aka fi amfani da su.Gwaje-gwaje a kan bayanan martaba na fina-finai na Ta-C sun nuna cewa bayanin martaba na 360 ° na'urar tacewa ta lanƙwasa ba ta canzawa da yawa idan aka kwatanta da na'urar tacewa ta 90 ° lanƙwasa, don haka tasirin 90 ° lanƙwasa magnetic tace ga manyan barbashi na iya zama asali. samu.90 ° Bendend naúrar tnlration na magnetic shine mafi yawan nau'ikan nau'ikan abubuwa guda biyu: ɗayan yana da lanƙwasa bendenoid a cikin ɗakin kwana, kuma ɗayan kuma a tsakanin su kawai a cikin tsari ne kawai a cikin tsarin.Aiki matsa lamba na 90 ° lanƙwasa Magnetic tace na'urar ne a cikin tsari na 10-2Pa, kuma shi za a iya amfani da a cikin wani fadi da kewayon aikace-aikace, kamar shafi nitride, oxide, amorphous carbon, semiconductor fim da karfe ko wadanda ba karfe fim. .

Ingancin na'urar tacewa na maganadisu
Tun da ba duk manyan barbashi ba zasu iya rasa makamashin motsi a cikin ci gaba da karo da bango, wasu adadin manyan barbashi zasu isa wurin ta hanyar bututun bututu.Sabili da haka, na'urar tacewa mai tsayi da kunkuntar tana da mafi girman ingancin tacewa na manyan barbashi, amma a wannan lokacin zai ƙara asarar ions da aka yi niyya kuma a lokaci guda yana ƙara haɓakar tsarin.Saboda haka, tabbatar da cewa Magnetic tace na'urar yana da kyau kwarai manyan barbashi cire da kuma high dace da ion kai sufuri ne mai zama dole sharudda ga Multi-arc ion shafi fasahar samun fadi da aikace-aikace hange a depositing high yi bakin ciki fina-finai.Aiki na na'urar tacewa maganadisu tana shafar ƙarfin filin maganadisu, lanƙwasa son zuciya, buɗaɗɗen baffle na inji, tushen baka na halin yanzu da kusurwar abin da ya faru.Ta hanyar saita ma'auni masu ma'ana na na'urar tacewa maganadisu, tasirin tace manyan barbashi da ingancin canja wurin ion na manufa na iya inganta yadda ya kamata.