Plasma ingantaccen tururin sinadarai

Plasma Properties
Halin plasma a cikin haɓakar tururin sinadarai na plasma shine cewa ya dogara da makamashin motsa jiki na electrons a cikin plasma don kunna halayen sinadarai a cikin lokacin gas.Tun da plasma tarin ions ne, electrons, tsaka-tsakin atom da kwayoyin halitta, ba shi da tsaka tsaki ta hanyar lantarki a matakin macroscopic.A cikin plasma, ana adana babban adadin kuzari a cikin makamashi na cikin plasma.Asalin Plasma an raba shi zuwa plasma mai zafi da plasma mai sanyi.a cikin tsarin PECVD plasma ne mai sanyi wanda aka samo shi ta hanyar ƙarancin iskar gas.Wannan plasma da aka samar ta hanyar ƙaramin matsi da ke ƙasa da ƴan ɗari Pa shine plasma mara daidaituwa.
Halin wannan plasma shine kamar haka:
(1) Motsin thermal na electrons da ions mara daidaituwa ya wuce motsin da aka jagorance su.
(2) Its ionization tsari ne yafi lalacewa ta hanyar karo da sauri electrons da gas kwayoyin.
(3) Matsakaicin kuzarin motsi na thermal na electrons shine umarni 1 zuwa 2 na girma sama da na barbashi masu nauyi, kamar kwayoyin halitta, atoms, ions da free radicals.
(4) Ana iya rama hasarar makamashi bayan karon na'urorin lantarki da na'urori masu nauyi daga filin lantarki tsakanin karo.
Yana da wahala a siffata ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar ƙwayar cuta ce ta PECVD, inda zafin wutar lantarki Te bai zama daidai da zafin jiki na Tj na ƙananan barbashi ba.A cikin fasahar PECVD, aikin farko na plasma shine samar da ions masu aiki da sinadarai da radicals masu kyauta.Wadannan ions da free-radicals suna amsawa tare da wasu ions, atoms da kwayoyin a cikin gas lokaci ko haifar da lalacewa da lalata da halayen sunadarai a saman farfajiyar ƙasa, kuma yawan amfanin kayan aiki aiki ne na yawan electron, maida hankali mai amsawa da yawan yawan amfanin ƙasa.A wasu kalmomi, yawan amfanin kayan aiki ya dogara da ƙarfin filin lantarki, matsa lamba gas, da matsakaicin matsakaicin kyauta na barbashi a lokacin karo.Yayin da iskar gas ɗin da ke cikin plasma ke rabuwa saboda karon na'urorin lantarki masu ƙarfi, za'a iya shawo kan shingen kunna aikin sinadari kuma ana iya rage zafin iskar gas ɗin.Babban bambanci tsakanin PECVD da CVD na al'ada shine cewa ka'idodin thermodynamic na halayen sinadaran sun bambanta.Rarraba kwayoyin iskar gas a cikin plasma ba zaɓaɓɓu ba ne, don haka Layer fim ɗin da PECVD ta ajiye ya bambanta da CVD na al'ada.Tsarin tsari na PECVD na iya zama wanda ba shi da ma'auni na musamman, kuma samuwar sa ba ta da iyaka da ma'aunin motsin rai.Mafi al'ada fim Layer shine amorphous jihar.

PECVD fasali
(1) Ƙananan zafin jiki.
(2) Rage damuwa na ciki wanda ya haifar da rashin daidaituwa na haɓakar haɓakar faɗaɗawar layi na membrane/base abu.
(3) Ƙimar ƙaddamarwa yana da girma, musamman ƙananan zafin jiki, wanda ke da amfani don samun fina-finai na amorphous da microcrystalline.

Saboda ƙananan tsarin zafin jiki na PECVD, za a iya rage lalacewar thermal, rarrabawar juna da amsawa tsakanin fim ɗin fim da kayan aiki na substrate, da dai sauransu, don haka za'a iya shafe kayan lantarki duka biyu kafin a yi su ko kuma saboda buƙata. don sake yin aiki.Don kera manyan sikelin hadedde da'irori (VLSI, ULSI), fasahar PECVD ta sami nasarar amfani da fasahar siliki nitride fim (SiN) a matsayin fim ɗin kariya ta ƙarshe bayan samuwar wayoyi na Al-electrode, kazalika da flattening da samuwar silicon oxide fim a matsayin interlayer rufi.A matsayin na'urorin fim na bakin ciki, fasahar PECVD ta kuma samu nasarar yin amfani da fasahar kere kere-fim transistor (TFTs) don nunin LCD, da sauransu, ta amfani da gilashi a matsayin madaidaicin hanyar matrix mai aiki.Tare da haɓaka haɗaɗɗun da'irori zuwa babban sikelin da haɓaka mafi girma da kuma yawan amfani da na'urorin semiconductor, ana buƙatar PECVD a ƙananan zafin jiki da mafi girman matakan makamashi na lantarki.Don saduwa da wannan buƙatun, fasahar da za su iya haɗa fina-finai mafi girma a yanayin zafi za a haɓaka.An yi nazarin fina-finai na SiN da SiOx da yawa ta hanyar amfani da plasma na ECR da sabuwar fasahar sinadarai ta sinadarai (PCVD) tare da plasma na helical, kuma sun kai matsayi mai mahimmanci a cikin yin amfani da fina-finai na insulation na interlayer don manyan sikelin haɗin gwiwar haɗin gwiwa, da dai sauransu.