ʻO nā pōmaikaʻi o nā pahuhopu Cylindrical

1) ʻOi aku ka nui o ka hoʻohana ʻana o nā pahu pahu cylindrical ma mua o nā pahuhopu planar.I ke kaʻina hana hoʻouhi, inā he ʻano magnetic rotary a i ʻole ka pahu pahu ʻano cylindrical sputtering target, e hele mau nā ʻāpana āpau o ka ʻili o ka pahu pahu i ka wahi sputtering i hana ʻia i mua o ka magnet mau loa e loaʻa ka cathode sputtering, a me ka hiki ke hoʻokaʻawale like ʻia ka pahu hopu, a kiʻekiʻe ka nui o ka hoʻohana ʻana.ʻO ka nui o ka hoʻohana ʻana i nā mea i manaʻo ʻia ma kahi o 80% ~ 90%.

2) ʻAʻole maʻalahi nā pahuhopu cylindrical e hana i ka "poisoning target".I ka wā o ka uhi ʻana, ʻo ka ʻili o ka pahu pahu i hoʻopaʻa ʻia i nā manawa a pau a hoʻopaʻa ʻia e nā ion, a ʻaʻole maʻalahi ka hōʻiliʻili ʻana i nā oxides mānoanoa a me nā kiʻiʻoniʻoni insulating ʻē aʻe ma luna o ka ʻili, a ʻaʻole maʻalahi ka hana ʻana i ka "poisoning target".

3) He maʻalahi a maʻalahi ka hoʻonohonoho ʻana o ka pahu pahu rotary type cylindrical sputtering target.

4) Loaʻa nā ʻano like ʻole o ka pahu pahu pahu pahu cylindrical.planar pahu hopu me metala pahu hopu pololei wai hooluolu, a me kekahi mea hiki ole ke hana a hana cylindrical pahu hopu, e like me In2-SnO2 pahu hopu, etc. me ka pauka mea no ka wela isostatic kaomi e loaa papa-like pahu hopu, no ka mea, ka nui hiki ole ke hana. nui, a brittle, no laila, pono e hoʻohana i ke ʻano brazing a me ke keleawe backplate e hoʻohui a laila e hoʻokomo i ke kumu pahuhopu.Ma waho aʻe o nā paipu metala, hiki ke hoʻopili ʻia nā pahu kolamu ma luna o ka ʻili o nā paipu kila kila me nā mea like ʻole e pono e uhi ʻia, e like me Si, Cr, etc.

I kēia manawa, ke hoʻonui nei ka nui o nā pahuhopu cylindrical no ka uhi ʻana i ka hana ʻoihana.ʻAʻole hoʻohana wale ʻia nā pahu pahu cylindrical no ka mīkini hoʻopili kūpaʻa akā hoʻohana pū kekahi i ka ʻōwili e ʻōwili i ka mīkini uhi.I nā makahiki i hala iho nei, ua hoʻololi mālie ʻia nā pahu māhoe planar e nā pahu māhoe Cylindrical.

——Ua hoʻokuʻu ʻia kēia ʻatikala e Guangdong Zhenhua Technology, aka mea hana i nā mīkini hoʻopili optical.