ʻO nā hiʻohiʻona o nā lako hoʻopili CVD

Loaʻa i ka ʻenehana coating CVD nā hiʻohiʻona penei:

1. He mea maʻalahi a maʻalahi ka hana kaʻina hana o nā lako CVD, a hiki iā ia ke hoʻomākaukau i nā kiʻiʻoniʻoni hoʻokahi a i ʻole hui pū ʻia a me nā kiʻi ʻoniʻoni me nā ʻano like ʻole;

2. ʻO ka uhi CVD he nui nā noi, a hiki ke hoʻohana ʻia no ka hoʻomākaukau ʻana i nā ʻano metala a i ʻole nā ​​mea ʻoniʻoni metala;

3. ʻO ka maikaʻi o ka hana kiʻekiʻe ma muli o ka helu deposition mai kahi mau microns a hiki i nā haneli microns i kēlā me kēia minuke;

4. Hoʻohālikelike ʻia me ke ʻano PVD, ʻoi aku ka maikaʻi o ka hana diffraction o ka CVD a kūpono loa ia no ka uhi ʻana i nā substrates me nā ʻano paʻakikī, e like me nā grooves, nā puka i uhi ʻia, a me nā hale puka makapō.Hiki ke hoʻopiliʻia ka uhi i kahi kiʻiʻoniʻoni me ka paʻa maikaʻi.Ma muli o ke kiʻekiʻe kiʻekiʻe i ka wā o ke kaʻina hana kiʻiʻoniʻoni, a me ka hoʻopili ikaika ʻana i ke kiʻi substrate interface, paʻa loa ka papa kiʻiʻoniʻoni.

5. ʻO ka pōʻino i hanaʻia e ka radiation he haʻahaʻa haʻahaʻa a hiki ke hoʻohuiʻia me nā kaʻina kaʻapuni hoʻohui MOS.

——Ua paʻi ʻia kēia ʻatikala e Guangdong Zhenhua, amea hana mīkini hoʻopaʻa haʻahaʻa