Nā hiʻohiʻona o ka sputtering coating films

① Ka hoʻomalu maikaʻi a me ka hoʻihoʻi hou ʻana o ka mānoanoa kiʻiʻoniʻoni

Inā hiki ke hoʻomalu ʻia ka mānoanoa kiʻiʻoniʻoni ma kahi waiwai i koho mua ʻia, ua kapa ʻia ʻo ia ka mana mānoanoa film.Hiki ke hana hou i ka mānoanoa kiʻi i makemake ʻia no nā manawa he nui, i kapa ʻia ʻo film thickness repeatability.No laila, hiki ke hoʻopaʻa ʻia ka mānoanoa o ke kiʻi sputtered, a hiki ke hoʻopaʻa pono ʻia ke kiʻi me ka mānoanoa i koho mua ʻia.Eia kekahi, hiki ke loaʻa i ka uhi sputter kahi kiʻiʻoniʻoni me ka mānoanoa like ʻole ma kahi ākea nui.

② Hoʻopili ikaika ma waena o ke kiʻiʻoniʻoni a me ka substrate

ʻO ka ikehu o nā ʻātoma sputtered he 1-2 mau kauoha o ka nui ma mua o nā ʻātoma evaporated.ʻOi aku ka kiʻekiʻe o ka hoʻololi ʻana o ka ikehu o nā ʻātoma sputtered kiʻekiʻe i waiho ʻia ma ka substrate ma mua o nā atoms evaporated, kahi e hoʻoulu ai i ka wela kiʻekiʻe a hoʻonui i ka adhesion ma waena o nā atoms sputtered a me ka substrate.Eia kekahi, ʻo kekahi mau atoms sputtered ikaika kiʻekiʻe e hana i nā degere like ʻole o ka injection, e hana ana i kahi papa pseudodiffusion ma ka substrate.Eia kekahi, hoʻomaʻemaʻe mau ʻia ka substrate a hoʻāla ʻia i ka ʻāina plasma i ka wā o ke kaʻina hana kiʻiʻoniʻoni, kahi e hoʻoneʻe ai i nā atoms sputtering me ka adhesion nāwaliwali, a hoʻomaʻemaʻe a hoʻōla i ka ʻili substrate.No laila, ʻo ka kiʻiʻoniʻoni sputtered he pili ikaika i ka substrate.

③ Hiki ke hoʻomākaukau ʻia nā kiʻiʻoniʻoni hou ʻokoʻa mai ka pahu hopu

Inā hoʻokomo ʻia ke kinoea reactive i ka wā sputtering e hoʻokō me ka pahu hopu, hiki ke loaʻa kahi kiʻiʻoniʻoni ʻokoʻa hou mai ka pahu hopu.No ka laʻana, hoʻohana ʻia ke silika ma ke ʻano he sputtering target, a hoʻokomo ʻia ka oxygen a me ka argon i loko o ke keʻena māmā.Ma hope o ka sputtering, hiki ke loaʻa iā SiOz insulating film.Ke hoʻohana nei i ka titanium e like me ka pahuhopu sputtering, hoʻokomo ʻia ka nitrogen a me argon i loko o ke keʻena vacuum pū kekahi, a hiki ke loaʻa ke kiʻi ʻoniʻoni like me ke gula TiN ma hope o ka sputtering.

④ ʻO ka maʻemaʻe kiʻekiʻe a me ka maikaʻi o ke kiʻiʻoniʻoni

No ka mea, ʻaʻohe ʻāpana crucible i loko o ka mea hoʻomākaukau kiʻiʻoniʻoni sputtering, ʻaʻole e hui ʻia nā ʻāpana o ka mea hoʻomehana crucible i ka papa kiʻiʻoniʻoni sputtering.ʻO nā pōʻino o ka sputtering coating ʻo ia ka wikiwiki o ka hoʻokumu ʻana o ke kiʻiʻoniʻoni ma mua o ka uhi ʻana o ka evaporation, ʻoi aku ka kiʻekiʻe o ka substrate, maʻalahi ke hoʻopili ʻia e ke kinoea haumia, a ʻoi aku ka paʻakikī o ka ʻōnaehana.

Hoʻopuka ʻia kēia ʻatikala e Guangdong Zhenhua, kahi mea hanamea hoʻoheheʻe ʻia