He kūpono loa ka hoʻoheheʻe ʻana o ka magnetron vacuum no nā uhi hoʻoheheʻe reactive.ʻO ka ʻoiaʻiʻo, hiki i kēia kaʻina hana ke waiho i nā kiʻiʻoniʻoni lahilahi o nā mea oxide, carbide, a me nitride.Eia kekahi, ua kūpono ke kaʻina hana no ka waiho ʻana o nā hale kiʻiʻoniʻoni multilayer, me nā hoʻolālā optical, nā kiʻiʻoniʻoni kala, nā lole pale pale, nano-laminates, nā uhi superlattice, insulating films, etc. ua hoʻomohala ʻia nā hiʻohiʻona deposition no nā ʻano mea papa kiʻiʻoniʻoni optical.Aia kēia mau mea i nā mea conductive transparent, semiconductors, polymers, oxides, carbide, a me nitrides, aʻo nā fluoride e hoʻohana ʻia i nā kaʻina hana e like me ka uhi ʻana.
ʻO ka pōmaikaʻi nui o ka magnetron sputtering kaʻina hana e hoʻohana ana i nā kaʻina hoʻopiʻi reactive a i ʻole reactive e waiho i nā papa o kēia mau mea a me ka hoʻomalu maikaʻi ʻana i ka papa hana, ka mānoanoa kiʻiʻoniʻoni, ka like ʻana o ka mānoanoa film a me nā waiwai mechanical o ka papa.ʻO ke kaʻina hana nā hiʻohiʻona penei.
1、Ka nui o ka waiho ʻana.Ma muli o ka hoʻohana ʻana i nā electrodes magnetron kiʻekiʻe, hiki ke loaʻa kahi kahe ion nui, hoʻomaikaʻi maikaʻi i ka helu deposition a me ka wikiwiki o ka sputtering o kēia kaʻina hana uhi.Ke hoʻohālikelike ʻia me nā kaʻina hana hoʻoheheʻe sputtering, loaʻa i ka magnetron sputtering kahi mana kiʻekiʻe a me nā hua kiʻekiʻe, a hoʻohana nui ʻia i nā ʻano hana ʻoihana.
2、Ka mana kiʻekiʻe.E koho maʻamau ka mākaʻikaʻi ʻo Magnetron sputtering i ka uila i loko o ka laulā o 200V-1000V, maʻamau ʻo 600V, no ka mea, ʻo ka volta o 600V aia wale nō i loko o ka pae kiʻekiʻe o ka mana o ka mana.
3. Haʻahaʻa sputtering ikehu.Hoʻohana haʻahaʻa ka volta magnetron target, a hoʻopaʻa ka māla magnetic i ka plasma kokoke i ka cathode, ka mea e pale ai i nā ʻāpana i hoʻonui ʻia i ka ikehu mai ka hoʻokuʻu ʻana i ka substrate.
4、Ka wela substrate haʻahaʻa.Hiki ke hoʻohana ʻia ka anode e alakaʻi i nā electrons i hana ʻia i ka wā o ka hoʻokuʻu ʻana, ʻaʻole pono ke kākoʻo substrate e hoʻopau, hiki ke hoʻemi pono i ka pōʻino electron o ka substrate.No laila he haʻahaʻa ka mahana o ka substrate, he mea kūpono loa ia no kekahi mau substrate plastic i kū ʻole i ka uhi wela kiʻekiʻe.
5, Magnetron sputtering target surface etching 'aʻole like.ʻO Magnetron sputtering target surface etching uneven ua kumu ʻia e ke kahua magnetic uneven o ka pahu hopu.ʻOi aku ka nui o ka wahi o ka helu etching target, no laila ʻoi aku ka haʻahaʻa o ka hoʻohana pono ʻana o ka pahuhopu (ʻo 20-30% wale nō ka helu hoʻohana).No laila, no ka hoʻomaikaʻi ʻana i ka hoʻohana ʻana i ka pahuhopu, pono e hoʻololi ʻia ka hoʻoili ʻana o ke kahua magnetic e kekahi mau ala, a i ʻole ka hoʻohana ʻana i nā magnet e neʻe ana i ka cathode hiki ke hoʻomaikaʻi i ka hoʻohana ʻana.
6、Hui hui.Hiki ke hana i kahi kiʻiʻoniʻoni hoʻoheheʻe hoʻohuihui.I kēia manawa, ua hoʻopili maikaʻi ʻia ka hoʻohana ʻana i ke kaʻina sputtering pahuhopu magnetron composite ma luna o Ta-Ti alloy, (Tb-Dy) -Fe a me Gb-Co alloy film.He ʻehā ʻano ʻano o ka hoʻolālā pahu hoʻohuihui, ʻo ia ka pahu pahu i hoʻopili ʻia, ʻo ka pahu pahu i hoʻopaʻa ʻia, ʻo ka pahu pahu pahu liʻiliʻi a me ka pahu pahu pahu.ʻOi aku ka maikaʻi o ka hoʻohana ʻana i ka ʻāpana inlaid target structure.
7. Laulā o nā noi.Hiki i ke kaʻina hana sputtering Magnetron ke waiho i nā mea he nui, ʻo nā mea maʻamau: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti , Zr, SiO, AlO, GaAs, U, W, SnO, etc.
ʻO ka Magnetron sputtering kekahi o nā kaʻina hana uhi hoʻohana nui ʻia e kiʻi i nā kiʻiʻoniʻoni kiʻekiʻe.Me kahi cathode hou, loaʻa iā ia ka hoʻohana kiʻekiʻe kiʻekiʻe a me ka helu deposition kiʻekiʻe.Ua hoʻohana nui ʻia ʻo Guangdong Zhenhua Technology vacuum magnetron sputtering coating process i ka uhi ʻana o nā substrates nui.ʻAʻole hoʻohana wale ʻia ke kaʻina hana no ka hoʻopaʻa ʻana i nā kiʻi ʻoniʻoni hoʻokahi, akā no ka uhi ʻana i nā kiʻiʻoniʻoni multi-layer, ʻo ia hoʻi, ua hoʻohana ʻia i loko o ka ʻōwili e ʻōwili i ke kaʻina hana no ke kiʻi paʻi kiʻi ʻoniʻoni, kiʻi optical, lamination a me nā kiʻi ʻoniʻoni ʻē aʻe.
Ka manawa hoʻouna: Nov-07-2022