Ua kōkua ʻia ka ʻenehana hoʻopaʻa ʻana i ke kukui Ion

ʻO ka ʻoiaʻiʻo, ʻo Ion beam assisted deposition technology he ʻenehana hui.He ʻenehana lapaʻau ion i hui pū ʻia me ka hoʻopili ʻana i ka ion implantation a me ka ʻenehana kiʻiʻoniʻoni hoʻoheheʻe kino kino, a me kahi ʻano hou o ka ion beam surface optimization technique.Ma waho aʻe o nā pōmaikaʻi o ka waiho ʻana o ka mahu kino, hiki i kēia ʻenehana ke ulu mau i nā kiʻiʻoniʻoni mānoanoa ma lalo o nā kūlana mana ikaika, hoʻomaikaʻi i ka crystallinity a me ka orientation o ka papa kiʻiʻoniʻoni i ʻoi aku ka nui, hoʻonui i ka ikaika adhesion o ka papa kiʻiʻoniʻoni / substrate, hoʻomaikaʻi i ka denseness. o ka papa kiʻiʻoniʻoni, a synthesize i nā kiʻiʻoniʻoni hui pū me nā lakio stoichiometric maikaʻi ma kahi kokoke i ke ana wela, me nā ʻano kiʻiʻoniʻoni hou ʻaʻole hiki ke loaʻa ma ka lumi wela a me ke kaomi.ʻAʻole mālama wale ʻo Ion beam i nā pono o ke kaʻina hana implantation, akā hiki ke uhi i ka substrate me kahi kiʻiʻoniʻoni ʻokoʻa loa mai ka substrate.
Ma na ano a pau o ka waiho mahu kino a me ka mahu kemika, ua hiki ke hoohui ia i na pu ion hookui no ka hana ana i ka IBAD, a he elua mau hana IBAD nui penei, e like me ka hoike ana ma ka Pic.

E like me ka mea i hōʻike ʻia ma Pic (a), hoʻohana ʻia kahi kumu hoʻoheheʻe uila e hoʻomālamalama i ka papa kiʻiʻoniʻoni me ka kukuna ion i hoʻokuʻu ʻia mai ka pū ion, pēlā e ʻike ai i ka waiho ʻana i ke kukui ion.ʻO ka pōmaikaʻi ʻo ia ka hiki ke hoʻoponopono ʻia ka ikehu ion beam a me ke kuhikuhi ʻana, akā hoʻokahi wale nō a i ʻole nā ​​​​mea hoʻohui i hoʻohana ʻia e like me ke kumu evaporation, a ʻokoʻa kēlā me kēlā me kēia puʻupuʻu o ka mea hoʻohui a me ka mea hoʻohui. e kiʻi i ka papa kiʻiʻoniʻoni o ke kumu hoʻoheheʻe kumu.
Hōʻike ke kiʻi (b) i ka hoʻoheheʻe ʻana i ka ion beam sputtering-assisted deposition, i ʻike ʻia hoʻi ʻo ka lua ion beam sputtering deposition, kahi i hoʻohana ʻia ai ka pahu i hana ʻia me ka mea hoʻoheheʻe ion beam sputtering, hoʻohana ʻia nā huahana sputtering e like me ke kumu.ʻOiai e waiho ana ma luna o ka substrate, loaʻa ka hoʻoheheʻe ʻana i ka ion beam sputtering ma o ka hoʻomālamalama ʻana me kekahi kumu ion.ʻO ka pōmaikaʻi o kēia ʻano hana ʻo ia ka loaʻa ʻana o nā ʻāpana sputtered i kekahi ikehu, no laila ʻoi aku ka maikaʻi o ka hoʻopili ʻana me ka substrate;Hiki ke hoʻopili ʻia kekahi ʻāpana o ka pahu hopu, akā hiki ke hoʻololi i ka sputtering i loko o ke kiʻiʻoniʻoni, maʻalahi e hoʻoponopono i ke ʻano o ka kiʻiʻoniʻoni, akā haʻahaʻa kona deposition pono, pipiʻi ka pahuhopu a aia nā pilikia e like me ke koho sputtering.