ʻenehana kānana mākēneki

ʻO ka manaʻo kumu o ka mīkini kānana magnetic
ʻO ke ʻano kānana o ka mīkini kānana magnetic no nā ʻāpana nui i ka beam plasma penei:
I ka hoʻohana ʻana i ka ʻokoʻa ma waena o ka plasma a me nā ʻāpana nui e mālama ana a me ka ratio charge-to-mass, aia kahi "pale" (a i ʻole he baffle a i ʻole ka pā curved tube) e waiho ana ma waena o ka substrate a me ka ʻili cathode, kahi e ālai ai i nā ʻāpana e neʻe ana i kahi. laina pololei ma waena o ka cathode a me ka substrate, ʻoiai hiki ke hoʻohuli ʻia nā ion e ka māla magnetic a hele i ka "pale" i ka substrate.

Ke kumu hana o ka mīkini kānana magnetic

Iloko o ke kahua hookuonoono, Pe<

ʻO Pe ​​a me Pi ka radii Larmor o nā electrons a me nā ion, a ʻo a ke anawaena o loko o ka kānana magnetic.Hoʻopili ʻia nā electrons i loko o ka plasma e ka ikaika Lorentz a wili ma ke kahua magnetic axially, ʻoiai ʻoi aku ka liʻiliʻi o ka pā magnetic i ka hui ʻana o nā ion ma muli o ka ʻokoʻa ma waena o nā ion a me nā electrons i ka radius Larmor.Eia naʻe, i ka wā e neʻe ai ka electron ma ke axis o ka mīkini kānana magnetic, e huki ia i nā ion ma ke axial no ka neʻe ʻana o ka rotational ma muli o kona nānā ʻana a me ke kahua uila maikaʻi ʻole, a ʻoi aku ka wikiwiki o ka electron ma mua o ka ion, no laila ka electron. e huki mau i ka ion i mua, oiai ka plasma e mau ana i ka quasi-electrically neutral.ʻO nā ʻāpana nui he electroly neutral a i ʻole ka hoʻopiʻi maikaʻi ʻole ʻia, a ʻoi aku ka nui o ka maikaʻi ma mua o nā ion a me nā electrons, ʻaʻole i hoʻopilikia ʻia e ke kahua magnetic a me ka neʻe laina ma ka inertia, a e kānana ʻia ma hope o ka hui ʻana me ka paia o loko o ka pā. mea hana.
Ma lalo o ka hana hui ʻana o ka curvature magnetic field curvature a me ka gradient drift a me ka ion-electron collisions, hiki ke hoʻohuli ʻia ka plasma i ka mīkini kānana magnetic.I loko ʻO nā kumu hoʻohālike maʻamau i hoʻohana ʻia i kēia lā, ʻo ia ka Morozov flux model a me ka Davidson rigid rotor model, nona ka hiʻohiʻona maʻamau: aia kahi māla magnetic e hoʻoneʻe ai i nā electrons i kahi ʻano helical.
ʻO ka ikaika o ke kahua magnetic e alakaʻi ana i ka neʻe axial o ka plasma i loko o ka mīkini kānana magnetic e like me:

ʻO Mi, Vo, a me Z ka nui o ka ion, ka wikiwiki o ka lawe ʻana, a me ka helu o nā uku i lawe ʻia.ʻO a ke anawaena o loko o ka kānana mākēneki, a ʻo e ka hoʻoili electron.
Pono e hoʻomaopopo ʻia ʻaʻole hiki ke hoʻopaʻa piha ʻia kekahi mau ion ikehu kiʻekiʻe e ka kukuna electron.Hiki iā lākou ke hōʻea i ka paia o loko o ka kānana magnetic, e hana ana i ka paia o loko i kahi kūpono kūpono, a laila e kāohi i nā ion mai ka hoʻomau ʻana i ka pā i loko a hoʻemi i ka nalowale o ka plasma.
Ma muli o kēia ʻano, hiki ke hoʻopili ʻia kahi kaomi hoʻopono kūpono i ka paia o ka mīkini kānana magnetic e pale ai i ka hui ʻana o nā ion e hoʻomaikaʻi i ka pono o ka lawe ʻana i ka ion.

Hoʻokaʻawale ʻana o ka mīkini kānana magnetic
(1) Hoʻolālā laina.Ke hana nei ke kahua magnetic ma ke ʻano he alakaʻi no ka kahe ʻana o ka ion beam, e hōʻemi ana i ka nui o ka wahi cathode a me ka hapa o nā puʻupuʻu macroscopic particle, ʻoiai e hoʻoikaika ana i nā collisions i loko o ka plasma, e koi ana i ka hoʻololi ʻana o nā ʻāpana kūʻokoʻa i nā ion a me ka hoʻemi ʻana i ka nui o nā macroscopic. puʻupuʻu puʻupuʻu, a hoʻemi wikiwiki i ka helu o nā mea nui i ka piʻi ʻana o ka ikaika o ka māla magnetic.Ke hoʻohālikelike ʻia me ke kaʻina hana hoʻopili ion multi-arc maʻamau, ua lanakila kēia mea hana i ka hōʻemi nui o ka pono i hana ʻia e nā ʻano hana ʻē aʻe a hiki ke hōʻoia i ka nui o ka deposition kiʻiʻoniʻoni mau ʻoiai e hōʻemi ana i ka nui o nā ʻāpana nui ma kahi o 60%.
(2) ʻO ke ʻano ʻano ʻāpipi.ʻOiai he ʻano ʻano like ʻole ke ʻano o ka hale, akā like ke kumu kumu.Ke neʻe nei ka plasma ma lalo o ka hana hui ʻana o ka māla magnetic a me ke kahua uila, a hoʻohana ʻia ka māla magnetic e hoʻopaʻa a hoʻomalu i ka plasma me ka ʻole o ka hoʻohuli ʻana i ka neʻe ma ke ala o nā laina ikaika magnetic.A e neʻe nā ʻāpana i hoʻoili ʻole ʻia ma ka laina laina a hoʻokaʻawale ʻia.ʻO nā kiʻiʻoniʻoni i hoʻomākaukau ʻia e kēia mea hoʻolālā he paʻakikī kiʻekiʻe, haʻahaʻa haʻahaʻa haʻahaʻa, haʻahaʻa maikaʻi, ʻano nui o ka palaoa, a me ka hoʻopaʻa paʻa kiʻiʻoniʻoni ikaika.Hōʻike ka hōʻike XPS i ka paʻakikī o ka ʻili o nā kiʻiʻoniʻoni ta-C i uhi ʻia me kēia ʻano mea hiki ke hiki i 56 GPa, no laila ʻo ka mea hana curved ka mea i hoʻohana nui ʻia a maikaʻi hoʻi no ka wehe ʻana i nā mea nui, akā pono ka pono o ka lawe ʻana i ka ion. hoʻomaikaʻi hou aku.ʻO ka 90° bend magnetic filtration device kekahi o nā mea hana curved structure i hoʻohana nui ʻia.Hōʻike nā hoʻokolohua ma ka ʻaoʻao ʻili o nā kiʻi ʻoniʻoni Ta-C ʻaʻole loli nui ka ʻaoʻao o ka 360 ° bend magnetic filtration device i hoʻohālikelike ʻia me 90 ° bend magnetic filtration device, no laila hiki ke hoʻololi maoli ka hopena o ka 90 ° bend magnetic filtration no nā mea nui. loaa.ʻO ka 90 ° bend magnetic filtration device he ʻelua ʻano o nā hale: ʻo ka solenoid bend i hoʻokomo ʻia i loko o ke keʻena vacuum, a waiho ʻia kekahi ma waho o ke keʻena ʻūhā, a ʻo ka ʻokoʻa ma waena o lākou aia wale nō i ka hale.ʻO ke kaomi hana o 90 ° bend magnetic filtration device aia ma ke ʻano o 10-2Pa, a hiki ke hoʻohana ʻia i nā ʻano hana like ʻole, e like me ka uhi ʻana i ka nitride, oxide, carbon amorphous, semiconductor film a me ka metala a i ʻole ke kiʻi ʻoniʻoni. .

ʻO ka pono o ka mīkini kānana magnetic
No ka mea ʻaʻole hiki i nā ʻāpana nui āpau ke nalowale i ka ikehu kinetic i ka hoʻomau mau ʻana me ka pā, hiki i kekahi helu o nā ʻāpana nui ke hiki i ka substrate ma o ka puka paipu.No laila, ʻoi aku ka maikaʻi o ka filtration filtration mīkini lōʻihi a haiki i nā ʻāpana nui, akā i kēia manawa e hoʻonui ia i ka nalowale o nā ion target a i ka manawa like e hoʻonui ai i ka paʻakikī o ka hale.No laila, ʻo ka hōʻoia ʻana i ka mīkini kānana magnetic i ka wehe ʻana i nā ʻāpana nui a me ka maikaʻi kiʻekiʻe o ka lawe ʻana i ka ion he mea pono e pono ai no ka ʻenehana uhi ion multi-arc e loaʻa kahi manaʻo noi ākea i ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi.Hoʻopili ʻia ka hana ʻana o ka mīkini kānana magnetic e ka ikaika o ke kahua magnetic, bend bias, mechanical baffle aperture, arc source current and charged particle incidence angle.Ma ka hoʻonohonoho ʻana i nā ʻāpana kūpono o ka mīkini kānana magnetic, hiki ke hoʻomaikaʻi maikaʻi ʻia ka hopena kānana o nā ʻāpana nui a me ka pono o ka hoʻololi ʻana o ka ion.