Cov cuab yeej siv ntsug pem hauv ntej qhov rooj qauv thiab pawg layout.Nws tuaj yeem nruab nrog evaporation qhov chaw rau hlau thiab ntau yam khoom siv organic, thiab tuaj yeem evaporate silicon wafers ntawm ntau yam specifications.Nruab nrog precision alignment system, txheej txheej ruaj khov thiab txheej txheej muaj qhov rov ua tau zoo.
GX600 txheej txheej cov cuab yeej tuaj yeem raug, sib npaug thiab tswj tau evaporate cov khoom siv hluav taws xob los yog cov ntaub ntawv hlau mus rau hauv substrate.Nws muaj qhov zoo ntawm qhov yooj yim zaj duab xis tsim, siab purity thiab siab compactness.Lub puv-automatic zaj duab xis thickness ntawm lub sijhawm saib xyuas qhov system tuaj yeem ua kom rov ua dua thiab ruaj khov ntawm cov txheej txheem.Nws yog txawm peem rau nrog nws tus kheej melting muaj nuj nqi kom txo tau cov dependence rau tus neeg teb xov tooj cov kev txawj ntse.
Cov cuab yeej siv tau rau Cu, Al, Co, Cr, Au, Ag, Ni, Ti thiab lwm yam khoom siv hlau, thiab tuaj yeem coated nrog hlau zaj duab xis, dielectric txheej zaj duab xis, IMD zaj duab xis, thiab lwm yam. kev lag luam, xws li cov khoom siv fais fab, semiconductor rear ntim substrate txheej, thiab lwm yam.
GX600 | GX900 |
φ600 * 800 (mm) | φ900 * H1050 (mm) |