HFCVD0606

Lub tshuab nqus tsev txheej chamber ntawm cov tshuaj vapor deposition cov cuab yeej siv ib tug ywj siab ob txheej txheej dej-txias qauv, uas yog npaum thiab uniform nyob rau hauv txias, thiab muaj ib tug ruaj ntseg thiab ruaj khov qauv.Cov khoom siv yog tsim los nrog ob lub qhov rooj, ntau qhov kev soj ntsuam qhov rais thiab ntau qhov kev nthuav dav interfaces, uas yooj yim rau kev sib txuas sab nraud ntawm cov khoom siv hluav taws xob xws li ntsuas kub infrared, spectral tsom xam, kev saib xyuas video thiab thermocouple.Lub tswv yim tsim kho siab heev ua rau kev kho dua tshiab txhua hnub thiab kev saib xyuas, kev hloov kho thiab hloov kho cov cuab yeej siv tau yooj yim thiab yooj yim, thiab txo qis kev siv thiab txhim kho cov nqi.

Khoom nta:

1.Qhov kev nce nqi ntawm cov khoom siv feem ntau suav nrog cov ntsuas huab cua, solenoid valve thiab cov roj sib xyaw tank, uas ua kom muaj kev tswj xyuas cov txheej txheem roj ntws, kev sib xyaw ua ke thiab kev nyab xeeb ntawm cov roj sib txawv, thiab tuaj yeem xaiv cov khoom siv roj rau kev siv. kua roj qhov chaw, pab txhawb tus kheej xaiv ntawm ntau yam ntawm cov pa roj carbon ntau qhov chaw, thiab kev nyab xeeb siv cov khoom siv hluavtaws pob zeb diamond thiab electrode kua boron qhov chaw.
2.Lub tshuab nqus tsev twj tso kua mis yog nruab nrog lub twj tso kua mis uas ntsiag to thiab ua haujlwm tau zoo thiab lub tshuab nqus tsev twj turbo molecular uas tuaj yeem ua tau raws li lub tshuab nqus tsev siab tom qab ib puag ncig.Lub tshuab nqus tsev sib xyaw nrog cov ntsuas ntsuas thiab ntsuas ionization yog siv rau kev ntsuas lub tshuab nqus tsev, nrog rau lub tshuab ntsuas hluav taws xob capacitive uas tuaj yeem ntsuas qhov siab ntawm cov txheej txheem sib txawv gases hauv ntau yam.Lub deposition siab yog tag nrho tsis siv neeg tswj los ntawm high-precision proportional tswj valve.
3.Qhov dej txias tivthaiv yog nruab nrog ntau lub channel dej siab, ntws, ntsuas kub thiab software tsis siv neeg xyuas.Cov cua txias sib txawv yog ywj siab ntawm ib leeg, uas yooj yim rau kev kuaj mob sai.Tag nrho cov ceg muaj kev ywj pheej valve hloov, uas muaj kev nyab xeeb thiab ua haujlwm tau zoo.
4.Cov khoom siv hluav taws xob tswj tau txais qhov loj-loj txiv neej-tshuab interface LCD npo thiab koom tes nrog PLC tag nrho-automatic tswj los pab txhawb kev kho thiab ntshuam cov txheej txheem.Lub graphical nkhaus visually qhia cov kev hloov pauv thiab qhov tseem ceeb ntawm ntau yam tsis muaj, thiab cov khoom siv thiab cov txheej txheem tsis raug kaw thiab khaws cia kom yooj yim nrhiav qhov teeb meem thiab cov ntaub ntawv txheeb xyuas.
5.Lub workpiece khib yog nruab nrog lub servo lub cev muaj zog los tswj lub lifting thiab txo qis ntawm lub substrate rooj.Lub rooj graphite lossis liab tooj liab substrate tuaj yeem xaiv tau.Qhov ntsuas kub yog ntsuas los ntawm lub thermocouple.
6.Cov khoom khib nyiab tuaj yeem tsim tau tag nrho lossis cais raws li tus neeg yuav tsum tau ua kom tau raws li cov kev cai tshwj xeeb ntawm cov neeg siv khoom.
7.Lub sealing phaj Cheebtsam yog zoo nkauj thiab elegant.Lub sealing daim hlau nyob rau hauv ntau qhov chaw ua haujlwm module ntawm cov cuab yeej siv tau sai sai disassembled lossis qhib thiab kaw ntawm nws tus kheej, uas yooj yim heev rau siv.

Kub Filament CVD cov khoom siv yog tsim nyog rau kev tso cov ntaub ntawv pob zeb diamond tawv, thiab lwm yam. Nws yog siv cov khoom tiv thaiv nyias nyias xws li silicon thiab silicon carbide, tshav kub dissipation txheej ntawm cov cuab yeej, boron doped conductive pob zeb diamond electrode, ozone tshuaj tua kab mob ntawm electrolytic dej los yog dej phwj tuaj kho.