Lub zog siab plasma tuaj yeem foob pob thiab irradiate cov ntaub ntawv polymer, rhuav tshem lawv cov saw hlau molecular, tsim cov pab pawg nquag, ua kom lub zog saum npoo, thiab tsim etching.Plasma deg kev kho mob tsis cuam tshuam rau cov qauv sab hauv thiab kev ua haujlwm ntawm cov khoom siv ntau, tab sis tsuas yog hloov pauv cov khoom ntog.
Txhawm rau kom tsis txhob cuam tshuam cov yam ntxwv ntawm cov khoom nws tus kheej, plasma deg kev kho mob feem ntau tsis siv cov ntshav nrog lub zog ntau dua.Qhov txawv ntawm qhov kev kho mob no thiab lwm yam kev kho mob ntshav plasma yog:
1) Tsis txhob txhaj tshuaj ions lossis atoms rau hauv qhov chaw kho mob (xws li ion implantation).
2) Tsis txhob tshem cov khoom loj (xws li sputtering lossis etching).
3) Tsis txhob ntxiv ntau tshaj ob peb ib leeg (atomic) txheej ntawm cov khoom rau saum npoo (xws li deposition).
Nyob rau hauv luv luv, plasma nto kev kho mob tsuas yog muaj nyob rau hauv ob peb atomic txheej.
Cov txheej txheem tsis haum rau kev hloov kho plasma nto feem ntau suav nrog roj siab, hluav taws xob zaus, lub zog tawm, lub sijhawm ua haujlwm, thiab lwm yam. Cov txheej txheem tsis yooj yim kho.Thaum lub sij hawm hloov cov txheej txheem plasma, ntau cov khoom nquag nquag tuaj yeem cuam tshuam nrog qhov chaw kho mob uas lawv tuaj yeem sib cuag nrog, thiab tuaj yeem siv los kho cov khoom nto.Piv nrog rau cov txheej txheem ib txwm muaj, kev hloov kho plasma nto muaj qhov zoo ntawm cov txheej txheem yooj yim, kev ua haujlwm yooj yim, tus nqi qis, tsis muaj kuab paug, tsis muaj pov tseg, kev tsim khoom zoo, thiab kev ua haujlwm siab.
Post lub sij hawm: Jun-07-2023