1. Lub workpiece bias yog tsawg
Vim yog qhov sib ntxiv ntawm cov cuab yeej los ua kom tus nqi ionization nce, qhov tso tawm tam sim no ceev tau nce, thiab qhov tsis zoo ntawm qhov hluav taws xob raug txo rau 0.5 ~ 1kV.
Lub backsputtering tshwm sim los ntawm kev foob pob ntau dhau ntawm lub zog ions thiab kev puas tsuaj rau ntawm qhov chaw ua haujlwm tau txo qis.
2. Cov ntshav plasma ntau ntxiv
Ntau yam kev ntsuas los txhawb kev sib tsoo ionization tau ntxiv, thiab cov hlau ionization tau nce los ntawm 3% mus rau ntau dua 15%.Qhov ceev ntawm lub puab tsaig ions thiab lub zog siab nruab nrab atoms, nitrogen ions, siab zog active atoms thiab active pab pawg nyob rau hauv lub txheej chamber yog nce, uas yog conducive rau cov tshuaj tiv thaiv rau cov tebchaw.Qhov saum toj no ntau yam kev txhim kho glow discharge ion txheej thev naus laus zis tau tuaj yeem tau txais TN nyuaj zaj duab xis txheej los ntawm cov tshuaj tiv thaiv kev tso tawm ntawm cov ntshav plasma ntau dua, tab sis vim tias lawv yog cov hom hluav taws xob glow, qhov paug tawm tam sim no tsis siab txaus (tseem mA / cm2 qib. ), thiab tag nrho cov plasma ntom ntom tsis siab txaus, thiab cov txheej txheem ntawm cov tshuaj tiv thaiv cov txheej txheem txheej txheej yog nyuaj.
3. Cov txheej txheej ntawm cov ntsiab lus evaporation qhov chaw me me
Ntau yam kev txhim kho ion txheej thev naus laus zis siv cov khoom siv hluav taws xob hluav taws xob evaporation, thiab gantu ua qhov chaw evaporation, uas yog txwv rau qee lub sijhawm saum gantu rau cov tshuaj tiv thaiv deposition, yog li cov khoom tsim tau tsawg, cov txheej txheem nyuaj, thiab nws nyuaj rau kev lag luam.
4. Hluav taws xob phom ua haujlwm siab
Cov phom hluav taws xob hluav taws xob yog 6 ~ 30kV, thiab cov khoom siv hluav taws xob tsis zoo yog 0.5 ~ 3kV, uas yog cov haujlwm ua haujlwm siab thiab muaj qee yam kev nyab xeeb.
—— Kab lus no tau tshaj tawm los ntawm Guangdong Zhenhua Technology, amanufacturers ntawm optical txheej tshuab.
Post lub sij hawm: May-12-2023