1. Thermal CVD tshuab
Cov txheej tawv tawv feem ntau yog cov hlau ceramic txheej (TiN, thiab lwm yam), uas yog tsim los ntawm cov tshuaj tiv thaiv ntawm cov hlau hauv txheej thiab reactive gasification.Thaum xub thawj, thermal CVD thev naus laus zis tau siv los muab lub zog ua kom muaj zog ntawm kev sib xyaw ua ke los ntawm thermal zog ntawm qhov kub ntawm 1000 ℃.Qhov kub no tsuas yog tsim nyog rau kev tso nyiaj TiN thiab lwm cov txheej txheem nyuaj ntawm cov cuab yeej cemented carbide.Txog tam sim no, nws tseem yog ib qho tseem ceeb thev naus laus zis los tso TiN-Al20 cov txheej txheem sib xyaw ntawm cov cemented carbide lub taub hau.
2. Hollow cathode ion txheej thiab kub hlau arc ion txheej
Hauv xyoo 1980s, hollow cathode ion txheej thiab kub hlau arc ion txheej tau siv los tso cov cuab yeej coated txiav.Ob leeg ntawm cov txheej txheem ion txheej no yog arc tawm ion txheej thev naus laus zis, nrog rau cov hlau ionization txog li 20% ~ 40%.
3. Cathode arc ion txheej
Qhov tshwm sim ntawm cathodic arc ion txheej tau coj mus rau txoj kev loj hlob ntawm cov cuab yeej ntawm depositing nyuaj txheej ntawm pwm.Tus nqi ionization ntawm cathodic arc ion txheej yog 60% ~ 90%, tso cai rau ntau cov hlau ions thiab cov tshuaj tiv thaiv roj ions kom ncav cuag qhov chaw ua haujlwm thiab tseem muaj kev ua haujlwm siab, ua rau cov tshuaj tiv thaiv deposition thiab tsim cov txheej txheem nyuaj xws li TiN.Tam sim no, cathodic arc ion txheej thev naus laus zis yog siv los tso cov txheej txheem nyuaj ntawm cov pwm.
Lub cathode arc qhov chaw yog ib qho khoom siv hauv lub xeev evaporation yam tsis muaj lub pas dej molten ruaj khov, thiab qhov chaw arc tuaj yeem muab tso rau hauv qhov chaw, txhim kho qhov chaw siv tus nqi ntawm chav txheej txheej thiab ua kom lub cub tawg muaj peev xwm.Cov duab ntawm cathode arc qhov chaw muaj xws li me me ncig cathode arc qhov chaw, columnar arc qhov chaw, thiab cov duab plaub tiaj tiaj loj arc qhov chaw.Cov khoom sib txawv ntawm qhov chaw me me, qhov chaw arc columnar, thiab cov chaw loj arc tuaj yeem npaj sib cais los tso cov yeeb yaj kiab ntau txheej thiab nano multilayer films.Lub caij no, vim yog cov hlau ionization siab ntawm cathodic arc ion txheej, hlau ions tuaj yeem nqus cov pa roj ntau dua, ua rau muaj ntau yam txheej txheem thiab kev ua haujlwm yooj yim kom tau txais cov txheej txheem zoo heev.Txawm li cas los xij, muaj cov dej ntxhib hauv microstructure ntawm txheej txheej tau los ntawm cathodic arc ion txheej.Nyob rau hauv xyoo tas los no, ntau cov thev naus laus zis tshiab tau tshwm sim los kho cov qauv ntawm cov txheej txheem zaj duab xis, uas tau txhim kho qhov zoo ntawm arc ion txheej zaj duab xis.
—— Kab lus no tau tshaj tawm los ntawm Guangdong Zhenhua Technology, amanufacturers ntawm optical txheej tshuab.
Post lub sij hawm: Apr-28-2023