Txheej txheem ntawm hollow cathode ion txheej

Cov txheej txheem ntawm hollow cathode ion txheej yog raws li nram no:

1 、 Muab Chin ingots nyob rau hauv lub cev qhuav dej.

2, Mounting lub workpiece.

3, Tom qab khiav tawm mus rau 5 × 10-3Pa, argon roj tau nkag mus rau hauv txheej txheej los ntawm cov raj nyiaj, thiab lub tshuab nqus tsev yog nyob ib ncig ntawm 100Pa.

4. Tig rau lub zog tsis ncaj ncees.

5 、 Tom qab tig rau lub zog arc kom ignite lub hollow cathode paug.Lub glow paug yog generated nyob rau hauv lub khawm raj, paug voltage yog 800 ~ 1000V, lub arc-raising tam sim no yog 30 ~ 50A.Vim lub hollow cathode nyhuv ntawm glow. tso tawm, High glow discharge tam sim no ceev, lub siab ceev ntawm nas ions nyob rau hauv lub silver tube bombards lub phab ntsa ntawm lub vantage raj, ua rau lub raj phab ntsa sai sai sov mus rau lub emission ntawm electron txaus, lub paug hom los ntawm lub glow discharge mam li hloov mus rau arc tawm, Voltage yog 40 ~ 70V, Tam sim no yog 80 ~ 300A.Silver tube kub txog li 2300K, Incandescent, Emits ib tug siab ceev kwj ntawm arc electrons los ntawm lub raj, thiab txhaj rau lub anode.

6, Kev hloov kho ntawm lub tshuab nqus tsev.Lub tshuab nqus tsev theem rau glow paug los ntawm hollow cathode phom yog hais txog 100 Pa, Thiab lub tshuab nqus tsev kawm ntawv txheej yog 8 × 10-1 ~ 2Pa.Yog li ntawd, Tom qab ignition ntawm lub arc tawm, Txo cov khoom argon. roj kom sai li sai tau, Kho lub tshuab nqus tsev mus rau ntau yam haum rau txheej.

7, Titanium plated puag txheej.Electron ntws mus rau lub anodically tsoo lub puab tsaig hlau ingot, Hloov ntawm kinetic zog rau thermal zog, Evaporation ntawm Chin hlau los ntawm cua sov, Vapor atoms ncav cuag lub workpiece los tsim ib tug titanium zaj duab xis.

8 、 Kev tso tawm ntawm TiN.Nitrogen roj yog nkag mus rau txheej txheej chamber, Nitrogen roj thiab evaporated atoms yog ionized rau hauv nitrogen thiab titanium ions.Saum lub crucible, siab dua qhov tshwm sim ntawm inelastic sib tsoo ntawm titanium vapor atoms nrog ntom kwj ntawm low-zog electrons, Cov hlau dissociation tus nqi yog siab li 20% ~ 40%, Titanium ions feem ntau yuav hnov ​​​​mob chemically nrog cov tshuaj tiv thaiv roj nitrogen, Deposition kom tau ib tug nitride mantle zaj duab xis txheej.Lub hollow cathode phom yog ob qho tib si vaporization qhov chaw, Lwm qhov chaw ntawm ionization.Thaum txheej txheej, tam sim no ntawm electromagnetic coil nyob ib ncig ntawm lub crucible yuav tsum tau kho, tsom lub electron beam mus rau qhov chaw ntawm lub cev qhuav dej, yog li, lub zog ceev ntawm electron txaus yog nce.

9, Fais fab tuag.Tom qab cov zaj duab xis thickness mus txog qhov predetermined zaj duab xis thickness, tua arc fais fab mov, Bias fais fab mov thiab cua mov.