Technical yam ntxwv ntawm lub tshuab nqus tsev evaporation txheej

1. Covnqus evaporation txheejtxheej txheem muaj xws li evaporation ntawm cov ntaub ntawv zaj duab xis, thauj vapor atoms nyob rau hauv siab nqus, thiab cov txheej txheem ntawm nucleation thiab loj hlob ntawm vapor atoms ntawm lub workpiece.

2. Lub tshuab nqus tsev deposition degree ntawm lub tshuab nqus tsev evaporation txheej yog siab, feem ntau 10-510^-3Pa. Txoj kev pub dawb ntawm cov roj molecules yog 1 ~ 10m qhov kev txiav txim ntawm qhov loj, uas ntau dua qhov kev ncua deb ntawm qhov chaw evaporation mus rau qhov chaw ua haujlwm, qhov kev ncua deb no yog hu ua evaporation nrug, feem ntau 300 ~ 800mm.Cov txheej txheej tsis sib tsoo nrog cov roj molecules thiab vapor atoms thiab ncav cuag lub workpiece.

3. Lub tshuab nqus tsev evaporation txheej txheej tsis yog qhov txhab plating, thiab cov vapor atoms ncaj nraim mus rau qhov chaw ua haujlwm hauv qab lub tshuab nqus tsev siab.Tsuas yog sab ntawm lub evaporation qhov chaw ntawm lub workpiece tuaj yeem tau txais cov txheej txheem zaj duab xis, thiab sab thiab sab nraub qaum ntawm lub workpiece tsis tuaj yeem tau txais cov txheej txheem zaj duab xis, thiab txheej txheej zaj duab xis muaj cov plating tsis zoo.

4. Lub zog ntawm cov khoom ntawm lub tshuab nqus tsev evaporation txheej txheej yog tsawg, thiab lub zog ncav cuag lub workpiece yog lub tshav kub lub zog nqa los ntawm evaporation.Txij li thaum lub tshuab ua haujlwm tsis muaj kev cuam tshuam thaum lub tshuab nqus tsev evaporation txheej, cov hlau atoms tsuas yog tso siab rau cov cua sov ntawm vaporization thaum lub sij hawm evaporation, evaporation kub yog 1000 ~ 2000 ° C, thiab lub zog nqa yog sib npaug rau 0.1 ~ 0.2eV, yog li lub zog ntawm cov zaj duab xis hais yog tsawg, lub zog sib txuas ntawm cov zaj duab xis txheej thiab matrix yog me me, thiab nws yog ib qho nyuaj rau tsim ib tug compound txheej.

5. Lub tshuab nqus tsev evaporation txheej txheej muaj cov qauv zoo.Lub tshuab nqus tsev vacuum evaporation plating txheej txheem yog tsim nyob rau hauv lub tshuab nqus tsev siab, thiab cov zaj duab xis hais nyob rau hauv lub vapor yog ib tug atomic scale, tsim ib tug zoo core nyob rau saum npoo ntawm lub workpiece.