Nqus magnetron sputtering yog tshwj xeeb tshaj yog haum rau reactive deposition txheej.Qhov tseeb, cov txheej txheem no tuaj yeem tso cov yeeb yaj kiab nyias ntawm cov khoom siv oxide, carbide, thiab nitride.Tsis tas li ntawd, cov txheej txheem kuj yog tshwj xeeb tshaj yog haum rau deposition ntawm multilayer zaj duab xis qauv, nrog rau optical designs, xim films, hnav-resistant coatings, nano-laminates, superlattice coatings, insulating films, thiab lwm yam thaum ntxov li 1970, zoo optical zaj duab xis. deposition piv txwv tau tsim rau ntau yam ntawm optical zaj duab xis txheej ntaub ntawv.Cov ntaub ntawv no suav nrog cov khoom siv pob tshab, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov oxides, carbides, thiab nitrides, thaum cov fluorides siv rau hauv cov txheej txheem xws li evaporative txheej.
Lub ntsiab kom zoo dua ntawm cov txheej txheem magnetron sputtering yog siv cov txheej txheem reactive lossis non-reactive txheej txheej rau cov txheej txheem ntawm cov ntaub ntawv no thiab kev tswj kom zoo ntawm txheej txheej, zaj duab xis thickness, zaj duab xis thickness uniformity thiab txhua yam khoom ntawm txheej.Cov txheej txheem muaj cov yam ntxwv raws li hauv qab no.
1, Loj deposition npaum li cas.Vim yog kev siv cov hlau nplaum hluav taws xob ceev ceev, cov ion loj tuaj yeem tau txais, txhim kho tus nqi deposition thiab sputtering tus nqi ntawm cov txheej txheem txheej no.Piv nrog rau lwm cov txheej txheem sputtering txheej txheem, magnetron sputtering muaj peev xwm thiab siab yield, thiab yog dav siv nyob rau hauv ntau lawm industrial ntau lawm.
2 、 Kev ua haujlwm siab zog.Magnetron sputtering lub hom phiaj feem ntau xaiv qhov hluav taws xob nyob rau hauv thaj tsam ntawm 200V-1000V, feem ntau yog 600V, vim tias qhov hluav taws xob ntawm 600V tsuas yog nyob rau hauv qhov ua tau zoo tshaj plaws ntawm kev siv hluav taws xob.
3. Tsawg sputtering zog.Lub hom phiaj magnetron voltage yog siv tsawg, thiab lub magnetic teb confines lub plasma nyob ze ntawm lub cathode, uas tiv thaiv ntau zog nqi hais los ntawm launching mus rau lub substrate.
4, Tsawg substrate kub.Lub anode tuaj yeem siv los coj tawm cov hluav taws xob tsim tawm thaum lub sij hawm tso tawm, tsis tas yuav tsum muaj kev txhawb nqa substrate kom tiav, uas tuaj yeem txo cov hluav taws xob tawg ntawm lub substrate.Yog li lub substrate kub yog tsawg, uas yog heev zoo tagnrho rau ib co yas substrates uas tsis heev resistant rau high kub txheej.
5, Magnetron sputtering lub hom phiaj nto etching tsis zoo li qub.Magnetron sputtering lub hom phiaj nto etching tsis sib xws yog tshwm sim los ntawm qhov tsis sib xws ntawm lub hom phiaj.Qhov chaw ntawm lub hom phiaj etching tus nqi yog qhov loj dua, kom qhov kev siv tau zoo ntawm lub hom phiaj yog tsawg (tsuas yog 20-30% kev siv tus nqi).Yog li ntawd, txhawm rau txhim kho kev siv lub hom phiaj, cov khoom sib nqus sib nqus yuav tsum tau hloov pauv los ntawm qee txoj kev, lossis kev siv cov hlau nplaum txav hauv cathode tuaj yeem txhim kho lub hom phiaj siv.
6. Composite phiaj.Yuav ua kom cov hom phiaj txheej txheej alloy zaj duab xis.Tam sim no, kev siv cov txheej txheem sib xyaw magnetron lub hom phiaj sputtering tau ua tiav ntawm Ta-Ti alloy, (Tb-Dy)-Fe thiab Gb-Co alloy zaj duab xis.Composite lub hom phiaj muaj plaub yam, feem, yog puag ncig inlaid phiaj, square inlaid phiaj, me me square inlaid phiaj thiab sector inlaid phiaj.Kev siv cov sector inlaid lub hom phiaj yog zoo dua.
7. Kev siv ntau yam.Magnetron sputtering txheej txheem tuaj yeem tso ntau lub ntsiab lus, feem ntau yog: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti. , Zr, SiO, AlO, GaAs, U, W, SnO, etc.
Magnetron sputtering yog ib qho ntawm feem ntau siv txheej txheej kom tau txais cov yeeb yaj kiab zoo.Nrog lub cathode tshiab, nws muaj lub hom phiaj siv siab thiab siab tso nyiaj ntau.Guangdong Zhenhua Technology lub tshuab nqus tsev magnetron sputtering txheej txheem yog tam sim no dav siv nyob rau hauv txheej ntawm loj-chaw substrates.Cov txheej txheem tsis yog tsuas yog siv rau ib txheej txheej zaj duab xis deposition, tab sis kuj rau ntau-txheej zaj duab xis txheej, ntxiv rau, nws kuj yog siv nyob rau hauv yob rau yob txheej txheem rau ntim zaj duab xis, optical zaj duab xis, lamination thiab lwm yam zaj duab xis txheej.
Post lub sij hawm: Nov-07-2022