Cov txheej txheem ntawm cathodic arc qhov chaw ion txheej yog qhov tseem ceeb tib yam li lwm cov txheej txheem txheej txheem, thiab qee qhov kev ua haujlwm xws li kev txhim kho cov khoom ua haujlwm thiab lub tshuab nqus tsev tsis rov ua dua.
1.Bombardment tu ntawm workpieces
Ua ntej txheej, cov roj argon tau nkag mus rau hauv cov txheej txheej nrog lub tshuab nqus tsev ntawm 2 × 10-2Pa.
Tig rau lub tshuab hluav taws xob pulse, nrog lub voj voog ua haujlwm ntawm 20% thiab lub zog ua haujlwm ntawm 800-1000V.
Thaum lub zog arc qhib, qhov chaw txias arc lub teeb tawm raug tsim tawm, uas tso tawm ntau cov hluav taws xob tam sim no thiab titanium ion tam sim no los ntawm qhov chaw arc, tsim cov plasma siab.Lub titanium ion accelerates nws txhaj tshuaj rau hauv lub workpiece nyob rau hauv qhov tsis zoo siab tsis zoo siab siv rau lub workpiece, bombarding thiab sputtering cov residual gas thiab pa phem adsorbed rau saum npoo ntawm lub workpiece, thiab ntxuav thiab purifying nto ntawm lub workpiece;Nyob rau tib lub sijhawm, cov roj chlorine hauv cov txheej txheej yog ionized los ntawm electrons, thiab argon ions ua kom lub foob pob tawg ntawm qhov chaw ua haujlwm.
Yog li ntawd, lub foob pob ua kom huv si yog qhov zoo.Tsuas yog kwv yees li 1 feeb ntawm kev ntxuav lub foob pob tuaj yeem ntxuav lub workpiece, uas yog hu ua "main arc bombardment".Vim yog qhov loj ntawm titanium ions, yog tias qhov chaw me me tau siv los ua cov foob pob thiab ntxuav lub workpiece ntev dhau lawm, qhov kub ntawm lub workpiece yog overheating, thiab cov cuab yeej ntug yuav mos.Hauv kev tsim khoom, qhov chaw me me tau muab tso rau ntawm ib qho los ntawm sab saum toj mus rau hauv qab, thiab txhua qhov me me arc muaj lub sijhawm ntxuav lub foob pob ntawm li 1 feeb.
(1) Txheej titanium hauv qab txheej
Txhawm rau txhim kho qhov adhesion ntawm zaj duab xis thiab substrate, ib txheej ntawm cov ntshiab titanium substrate feem ntau yog coated ua ntej txheej titanium nitride.Kho lub tshuab nqus tsev mus rau 5 × 10-2-3 × 10-1Pa, kho lub workpiece bias voltage rau 400-500V, thiab kho lub luag hauj lwm voj voog ntawm mem tes bias fais fab mov rau 40% ~ 50%.Tseem igniting me me arc qhov chaw ib los ntawm ib qho los ua kom txias teb arcing paug.Vim qhov txo qis hauv qhov tsis zoo ntawm qhov tsis zoo ntawm lub workpiece, lub zog ntawm titanium ions txo.Tom qab ncav cuag lub workpiece, cov nyhuv sputtering tsawg dua li cov nyhuv deposition, thiab titanium hloov txheej txheej yog tsim nyob rau hauv lub workpiece los txhim kho lub sib raug zoo quab yuam ntawm titanium nitride nyuaj zaj duab xis txheej thiab substrate.Cov txheej txheem no kuj yog cov txheej txheem ntawm cua sov lub workpiece.Thaum lub hom phiaj ntshiab titanium raug tso tawm, lub teeb nyob rau hauv lub plasma yog azure xiav.
1.Ammoniaated lub tais nyuaj zaj duab xis txheej
Kho lub tshuab nqus tsev kawm ntawv rau 3 × 10-1-5Pa, kho lub workpiece bias voltage rau 100-200V, thiab kho lub luag hauj lwm voj voog ntawm lub mem tes bias fais fab mov rau 70% ~ 80%.Tom qab nitrogen tau qhia, titanium yog sib xyaw cov tshuaj tiv thaiv nrog arc tso ntshav rau tso titanium nitride nyuaj zaj duab xis.Lub sijhawm no, lub teeb ntawm lub plasma hauv lub tshuab nqus tsev yog cherry liab.Yog C2H2, O2, thiab lwm yam yog qhia, TiCN, TiO2, thiab lwm yam zaj duab xis txheej tuaj yeem tau.
-Cov kab lus no tau tshaj tawm los ntawm Guangdong Zhenhua, atshuab nqus tsev txheej tshuab manufacturers
Post lub sij hawm: Jun-01-2023