Dab tsi yog yam uas cuam tshuam rau lub hom phiaj lom hauv magnetron sputtering?

1, Tsim cov hlau sib txuas ntawm lub hom phiaj nto
Qhov twg yog lub compound tsim nyob rau hauv tus txheej txheem ntawm kev tsim ib tug compound los ntawm ib tug hlau phiaj nto los ntawm ib tug reactive sputtering txheej txheem?Txij li thaum cov tshuaj tiv thaiv ntawm cov roj reactive thiab lub hom phiaj nto atoms tsim compound atoms, uas feem ntau yog exothermic, cov tshuaj tiv thaiv tshav kub yuav tsum muaj ib txoj kev tawm, txwv tsis pub cov tshuaj tiv thaiv tsis tau mus ntxiv.Nyob rau hauv lub tshuab nqus tsev, cov cua kub hloov ntawm cov pa hluav taws xob tsis tuaj yeem ua tau, yog li cov tshuaj tiv thaiv yuav tsum muaj nyob rau ntawm qhov chaw.Cov tshuaj tiv thaiv sputtering tsim cov tebchaw ntawm lub hom phiaj ntawm qhov chaw, substrate nto, thiab lwm yam khoom siv.Tsim cov tebchaw ntawm lub substrate nto yog lub hom phiaj, tsim cov tebchaw rau lwm qhov chaw ntawm cov txheej txheem yog qhov pov tseg ntawm cov peev txheej, thiab tsim cov khoom sib txuas ntawm lub hom phiaj ntawm qhov chaw pib raws li qhov chaw ntawm cov atoms sib xyaw thiab dhau los ua ib qho kev thaiv kom tsis tu ncua muab ntau cov atoms.

2, Qhov cuam tshuam ntawm lub hom phiaj lom
Lub ntsiab tseem ceeb cuam tshuam rau lub hom phiaj tshuaj lom yog qhov piv ntawm cov tshuaj tiv thaiv cov pa roj thiab cov roj sputtering, cov roj ntau dhau yuav ua rau lub hom phiaj lom.Reactive sputtering txheej txheem yog nqa tawm nyob rau hauv lub hom phiaj nto sputtering channel cheeb tsam zoo li yuav tsum tau them los ntawm cov tshuaj tiv thaiv compound los yog cov tshuaj tiv thaiv compound yog stripped thiab re-exposed hlau nto.Yog hais tias tus nqi ntawm compound tiam ntau dua tus nqi ntawm compound stripping, lub compound coverage cheeb tsam nce.Ntawm ib lub hwj chim, tus nqi ntawm cov tshuaj tiv thaiv roj koom nrog hauv kev sib xyaw ua ke nce thiab tus nqi ntawm cov khoom sib txuas ntxiv.Yog hais tias tus nqi ntawm cov tshuaj tiv thaiv roj nce ntau dhau, qhov chaw sib xyaw ua ke yuav nce.Thiab yog tias cov tshuaj tiv thaiv roj ntws tsis tuaj yeem hloov kho raws sijhawm, tus nqi ntawm thaj chaw sib xyaw ua ke nce ntxiv tsis raug cuam tshuam, thiab cov channel sputtering yuav raug txuas ntxiv los ntawm qhov sib xyaw, thaum lub hom phiaj sputtering tau them tag nrho los ntawm qhov sib xyaw, lub hom phiaj yog lom tag.

3, Lub hom phiaj lom tshwm sim
(1) zoo ion tsub zuj zuj: thaum lub hom phiaj lom, ib txheej ntawm insulating zaj duab xis yuav tsim nyob rau hauv lub hom phiaj nto, zoo ions ncav cuag lub hom phiaj cathode nto vim lub blockage ntawm insulating txheej.Tsis ncaj qha nkag mus rau lub hom phiaj cathode, tab sis sib sau rau ntawm lub hom phiaj nto, yooj yim los tsim cov teb txias rau arc tawm - arcing, kom cov cathode sputtering tsis tuaj yeem mus.
(2) anode disappearance: thaum lub hom phiaj lom, grounded nqus chamber phab ntsa kuj deposited insulating zaj duab xis, ncav lub anode electrons tsis tuaj yeem nkag mus rau lub anode, tsim anode disappearance tshwm sim.

4, Lub cev piav qhia ntawm lub hom phiaj lom
(1) Feem ntau, qhov thib ob electron emission coefficient ntawm cov hlau sib txuas yog siab dua li cov hlau.Tom qab lub hom phiaj lom, qhov chaw ntawm lub hom phiaj yog tag nrho cov hlau sib txuas, thiab tom qab raug foob los ntawm ions, tus naj npawb ntawm cov hluav taws xob thib ob tso tawm nce ntxiv, uas txhim kho cov khoom siv ntawm qhov chaw thiab txo cov ntshav impedance, ua rau qis dua sputtering voltage.Qhov no txo ​​qhov sputtering tus nqi.Feem ntau cov sputtering voltage ntawm magnetron sputtering nyob nruab nrab ntawm 400V-600V, thiab thaum lub hom phiaj lom tshwm sim, lub sputtering voltage yog ho txo.
(2) Lub hom phiaj hlau thiab lub hom phiaj sib xyaw ua ke yog qhov sib txawv ntawm qhov sib txawv, feem ntau ntawm cov sputtering coefficient ntawm cov hlau yog siab dua cov sputtering coefficient ntawm compound, yog li tus sputtering tus nqi qis tom qab lub hom phiaj lom.
(3) Lub sputtering efficiency ntawm reactive sputtering roj yog Ameslikas qis dua lub sputtering efficiency ntawm inert roj, yog li qhov kev sputtering tus nqi txo qis tom qab qhov feem ntawm cov roj reactive nce.

5, Kev daws teeb meem rau lub hom phiaj lom
(1) Txais qhov nruab nrab zaus fais fab mov lossis xov tooj cua zaus fais fab mov.
(2) Txais qhov kaw-voj tswj ntawm cov tshuaj tiv thaiv roj nkag.
(3) Txais ob lub hom phiaj
(4) Tswj cov kev hloov ntawm txheej txheej: Ua ntej txheej, hysteresis nyhuv nkhaus ntawm lub hom phiaj lom yog sau kom cov inlet cua ntws yog tswj nyob rau hauv pem hauv ntej ntawm tsim lub hom phiaj lom kom paub meej tias cov txheej txheem yog ib txwm nyob rau hauv lub hom ua ntej deposition. tus nqi poob qis heev.

-Cov kab lus no yog luam tawm los ntawm Guangdong Zhenhua Technology, lub chaw tsim khoom ntawm cov khoom siv nqus tsev vacuum.