Covtshuab nqus tsev txheejyog tsim los ntawm ntau qhov tseeb, uas yog tsim los ntawm ntau cov txheej txheem, xws li vuam, sib tsoo, tig, npaj, tho txawv, milling thiab lwm yam.Vim tias cov haujlwm no, qhov chaw ntawm cov khoom siv yuav tsis muaj kev cuam tshuam nrog qee cov pa phem xws li roj av, roj av, hlau chips, vuam flux, polishing paste, tawm hws thiab lwm yam.Cov pa phem no yooj yim rau volatilize hauv lub tshuab nqus tsev, yog li cuam tshuam rau lub tshuab nqus tsev qhov kawg ntawm cov khoom siv.
Tsis tas li ntawd, cov khoom siv nqus tsev vacuum no los ntawm kev ua tshuab nqus cov pa roj ntau hauv cov huab cua nyob ib puag ncig, thiab hauv lub tshuab nqus tsev, cov roj adsorbed yav dhau los no tseem yuav raug tso tawm dua, dhau los ua qhov tseem ceeb ntawm kev txwv lub tshuab nqus tsev.Vim li no, cov pa phem yuav tsum tau muab tshem tawm ua ntej qhov chaw ntawm lub tshuab nqus tsev txheej txheej tau sib sau ua ke.
Thaum siv cov khoom siv nqus tsev vacuum, nws cov khoom siv kuj yuav kis tau.Txawm li cas los xij, cov pa phem los ntawm qhov chaw no feem ntau yog tshwm sim los ntawm kev siv cov xwm txheej thiab lub tshuab nqus tsev twj.
1. Lub evaporation ntawm lub filament ntawm lub tshuab nqus tsev ntsuas nyob rau hauv lub kub kub tej yam kev mob yuav ua rau tsim ib tug zaj duab xis nyob rau hauv ceramic insulator, uas yuav ua rau nws cov rwb thaiv tsev lub zog rau ib tug tej yam, thiab kuj muaj ib tug tej yam kev cuam tshuam rau qhov tseeb ntawm nws. ntsuas;
2. Vim qhov kub thiab txias evaporation, ib zaj duab xis hlau yuav raug tsim nyob rau ntawm qhov chaw nyob ze ntawm lub filament ntawm electron phom hauv lub tshuab nqus tsev;
3. Vim yog cov khoom ua haujlwm sputtering, sab hauv phab ntsa ntawm ion beam etching cov cuab yeej yuav kis tau los ntawm splashes;
4. Sab hauv phab ntsa ntawm lub tshuab nqus tsev evaporation txheej cov cuab yeej yuav kis tau los ntawm nws cov khoom siv lub hom phiaj evaporation;
5. Lub tshuab nqus tsev ziab yog feem ntau siv, thiab lub kaw lus yuav kis tau los ntawm cov khoom evaporated;
6. Lub diffusion twj tso kua mis roj thiab cov tshuab twj tso kua mis roj hauv cov khoom siv lub tshuab nqus tsev yog qhov tseem ceeb ntawm cov pa phem.Tom qab lub tshuab txheej tau ua haujlwm ntev, cov yeeb yaj kiab roj tuaj yeem tsim hauv cov khoom siv.
Txhawm rau ua kom tiav, lub tshuab nqus tsev huv ntawm cov cuab yeej suav nrog cov khoom siv lub tshuab nqus tsev, lub tshuab nqus tsev, lub tshuab nqus tsev tsim khoom thiab lwm yam thiab kev sib txuas, nrog rau cov kev xav tau ntawm cov khoom siv lub tshuab nqus tsev nws tus kheej thiab cov txheej txheem nqus tsev tshwj xeeb ntawm kev siv.Yog li ntawd, lub tshuab nqus tsev vacuum yog ib qho teeb meem tsim nyog yuav tsum tau saib xyuas, vim tias cov pa phem no yuav cuam tshuam rau kev ua haujlwm ntawm cov cuab yeej siv, thiab yuav tsum tau them nyiaj rau kev tu tsis tu ncua lossis txhua lub sijhawm.
Post lub sij hawm: Feb-21-2023