Kev tiv thaiv evaporation qhov txheej yog dab tsi?

Resistance evaporation source txheej yog ib qho yooj yim nqus evaporation txheej txheej."Evaporation" yog hais txog kev npaj zaj duab xis nyias uas cov txheej txheem txheej hauv lub tshuab nqus tsev yog rhuab thiab evaporated, kom cov khoom atoms lossis molecules vaporize thiab khiav tawm ntawm qhov chaw, tsim vapor flow phenomenon, tshwm sim ntawm qhov chaw ntawm lub evaporation. substrate los yog substrate, thiab thaum kawg condensed los ua ib tug khoom zaj duab xis.

Lub npe hu ua evaporation qhov chaw txheej txheej txheej txheem yog siv tantalum, molybdenum, tungsten thiab lwm yam hlau melting point hlau los ua ib qho tsim nyog zoo ntawm evaporation qhov chaw, uas yog loaded nrog cov ntaub ntawv yuav tsum tau evaporated, cia cov cua ntws los ntawm, ncaj qha tshav kub thiab evaporate cov ntaub ntawv evaporated, los yog muab cov ntaub ntawv evaporated rau hauv alumina, beryllium oxide thiab lwm yam crucibles rau indirect cua sov thiab evaporation.Qhov no yog txoj kev tiv thaiv cua sov evaporation.

Covlub tshuab nqus tsev evaporation txheej tshuabrhuab thiab evaporated los ntawm cov cua sov ua haujlwm muaj qhov zoo ntawm cov qauv yooj yim, tus nqi qis thiab siv tau zoo.Nws tuaj yeem siv rau evaporation txheej ntawm cov ntaub ntawv uas tsis tshua muaj melting point, tshwj xeeb tshaj yog rau huab hwm coj ntau lawm nrog tsawg yuav tsum tau rau txheej zoo.Txog tam sim no, tseem muaj ntau cov txheej txheem txheej txheem ntawm cov cua sov thiab evaporation muab tso rau hauv kev tsim cov iav aluminized.

Qhov tsis zoo ntawm kev tiv thaiv evaporation qhov chaw evaporation txheej txheej yog tias qhov kub siab tshaj plaws uas tuaj yeem ncav cuag los ntawm cua sov yog txwv, thiab lub neej kev pab cuam ntawm lub rhaub kuj luv luv.Nyob rau hauv xyoo tas los no, txhawm rau txhim kho lub neej ntawm kev tiv thaiv evaporation qhov chaw, cov khoom siv Hoobkas tau siv cov khoom siv hluav taws xob ceramic synthesized los ntawm boron nitride nrog lub neej ntev raws li qhov chaw evaporation.Raws li daim ntawv tshaj tawm Japanese patent, nws tuaj yeem siv cov ntaub ntawv muaj li ntawm 20% ~ 30% boron nitride thiab cov ntaub ntawv refractory uas tuaj yeem fused nrog nws los ua cov evaporation qhov chaw (crucible), thiab coated nws nto nrog ib txheej ntawm zirconium uas muaj 62%. ~ 82%, thiab tus so yog zirconium-silicon alloy cov ntaub ntawv.