Cov cuab yeej siv feem ntau yog siv cov tshuaj vapor deposition los npaj oxide zaj duab xis, uas muaj cov yam ntxwv ntawm qhov ceev deposition npaum li cas thiab cov yeeb yaj kiab zoo.Raws li rau cov khoom siv, ob chav qhov rooj qauv yog siv los txhim kho lub clamping efficiency, thiab qhov tseeb cov kua roj kua system yog saws los xyuas kom meej ruaj khov thiab tswj tau txaus thiab zoo ua kom cov txheej txheem stability.Cov yeeb yaj kiab tau npaj los ntawm cov cuab yeej muaj dej vapor barrier zoo thiab lub sijhawm ruaj khov ntev dua hauv kev sim boiling.
Cov khoom siv tuaj yeem siv rau stainless hlau, electroplated hardware / yas qhov chaw, iav, ceramics thiab lwm yam ntaub ntawv, xws li cov khoom siv hluav taws xob, LED teeb hlaws, khoom siv kho mob thiab lwm yam khoom uas xav tau oxidation tsis kam.SiOx barrier zaj duab xis yog tsuas yog npaj los thaiv cov dej vapor, tiv thaiv corrosion thiab oxidation, thiab txhim kho khoom lub neej.
Cov qauv xaiv tau | sab hauv chamber loj |
ZHCVD 1200 | φ1200 * H1950 (mm) |