Cov khoom siv no siv cov hom phiaj magnetron los hloov cov ntaub ntawv txheej rau hauv nanometer qhov loj me, uas tau muab tso rau saum npoo ntawm substrates los ua cov yeeb yaj kiab nyias.Rolled zaj duab xis yog muab tso rau hauv lub tshuab nqus tsev chamber.Los ntawm cov qauv siv hluav taws xob winding, ib qho kawg tau txais zaj duab xis thiab lwm qhov muab cov yeeb yaj kiab.Nws txuas ntxiv mus dhau lub hom phiaj cheeb tsam thiab tau txais lub hom phiaj hais los ua ib zaj duab xis tuab.
Yam ntxwv:
1. Tsawg kub zaj duab xis tsim.Qhov kub tsis tshua muaj txiaj ntsig rau zaj duab xis thiab yuav tsis tsim deformation.Nws yog tsim rau PET, PI thiab lwm yam khoom siv hauv paus coil films.
2. Cov yeeb yaj kiab tuab tuaj yeem tsim tau.Nyias los yog tuab txheej tuaj yeem tsim thiab tso los ntawm kev hloov kho.
3. Ntau lub hom phiaj tsim, txheej txheem hloov tau.Lub tshuab tag nrho tuaj yeem nruab nrog yim lub hom phiaj, uas tuaj yeem siv los ua cov hom phiaj hlau yooj yim lossis cov hom phiaj sib xyaw thiab oxide.Nws tuaj yeem siv los npaj cov yeeb yaj kiab ib txheej nrog ib tus qauv lossis ntau txheej zaj duab xis nrog cov qauv sib xyaw.Cov txheej txheem yog hloov tau heev.
Cov khoom siv tuaj yeem npaj cov khoom siv hluav taws xob tiv thaiv zaj duab xis, hloov tau yooj yim Circuit Court board txheej, ntau yam dielectric films, ntau txheej AR antireflection zaj duab xis, HR siab antireflection zaj duab xis, xim zaj duab xis, thiab lwm yam. tuaj yeem ua tiav los ntawm kev tso nyiaj ib zaug.
Cov cuab yeej siv tau yooj yim cov hom phiaj hlau xws li Al, Cr, Cu, Fe, Ni, SUS, TiAl, thiab lwm yam, los yog cov hom phiaj sib xyaw xws li SiO2, Si3N4, Al2O3, SnO2, ZnO, Ta2O5, ITO, AZO, thiab lwm yam.
Cov khoom siv yog me me, compact hauv cov qauv tsim, me me hauv pem teb, tsis muaj zog siv, thiab hloov tau yooj yim.Nws yog qhov tsim nyog rau cov txheej txheem kev tshawb fawb thiab kev loj hlob lossis me me batch loj ntau lawm.