Qhov tseeb, Ion beam assisted deposition technology yog cov cuab yeej sib xyaw.Nws yog cov txheej txheem kev kho deg ion sib xyaw ua ke nrog ion implantation thiab lub cev vapor deposition zaj duab xis thev naus laus zis, thiab hom tshiab ntawm ion beam nto optimization txheej txheem.Ntxiv nrog rau qhov zoo ntawm lub cev vapor deposition, cov txheej txheem no tuaj yeem loj hlob tsis tu ncua ntawm cov yeeb yaj kiab tuab nyob rau hauv kev tswj hwm nruj dua, txhim kho crystallinity thiab kev taw qhia ntawm txheej zaj duab xis ntau dua, ua kom lub zog adhesion ntawm zaj duab xis txheej / substrate, txhim kho qhov ntom ntom. ntawm txheej zaj duab xis, thiab sib txuas cov yeeb yaj kiab sib xyaw nrog qhov zoo tshaj plaws stoichiometric ratios nyob ze ntawm chav tsev kub, nrog rau cov hom tshiab ntawm cov yeeb yaj kiab uas tsis tuaj yeem tau txais ntawm chav tsev kub thiab siab.Ion beam pab deposition tsis tsuas yog khaws qhov zoo ntawm ion implantation txheej txheem, tab sis kuj yuav npog lub substrate nrog ib tug txawv kiag li zaj duab xis los ntawm lub substrate.
Nyob rau hauv txhua yam ntawm lub cev vapor deposition thiab tshuaj vapor deposition, ib txheej ntawm auxiliary bombardment ion phom tuaj yeem raug ntxiv los ua ib qho IBAD system, thiab muaj ob txoj kev IBAD dav dav raws li hauv qab no, raws li qhia hauv Pic:
Raws li pom nyob rau hauv Pic (a), ib tug electron beam evaporation qhov chaw yog siv los irradiate zaj duab xis txheej nrog lub ion beam emitted los ntawm ion phom, yog li paub ion beam pab deposition.Qhov kom zoo dua yog tias ion beam lub zog thiab kev taw qhia tuaj yeem hloov kho, tab sis tsuas yog ib qho los yog tsawg alloy, los yog cov khoom sib xyaw tuaj yeem siv los ua qhov evaporation, thiab txhua qhov vapor siab ntawm cov khoom siv alloy thiab cov khoom sib txawv sib txawv, uas ua rau nws nyuaj. kom tau cov zaj duab xis txheej ntawm thawj evaporation qhov chaw muaj pes tsawg leeg.
Pic (b) qhia txog ion beam sputtering-pab deposition, uas tseem hu ua ob chav ion beam sputtering deposition, nyob rau hauv uas lub hom phiaj ua los ntawm ion beam sputtering txheej khoom, sputtering khoom yog siv los ua qhov chaw.Thaum tso nws rau ntawm lub substrate, ion beam sputtering assisted deposition yog tiav los ntawm irradiation nrog lwm qhov chaw ion.Qhov kom zoo dua ntawm txoj kev no yog tias cov sputtered hais lawv tus kheej muaj qee lub zog, yog li muaj qhov zoo dua adhesion nrog substrate;txhua yam ntawm lub hom phiaj tuaj yeem ua sputtered txheej, tab sis kuj tuaj yeem ua cov tshuaj tiv thaiv sputtering rau hauv zaj duab xis, yooj yim los kho cov muaj pes tsawg leeg ntawm cov yeeb yaj kiab, tab sis nws cov kev tso tawm qis qis, lub hom phiaj yog kim thiab muaj teeb meem xws li xaiv sputtering.
Post lub sij hawm: Nov-08-2022