Lub tshuab nqus tsev plasma tu cov cuab yeej siv cov qauv sib xyaw ua ke, nruab nrog RF ion ntxuav qhov system, tswj tsis siv neeg, ua haujlwm yooj yim thiab tu.
Lub tshuab hluav taws xob RF muaj peev xwm ua kom muaj cov plasma siab ceev, qhib, etch thiab ashing lub workpiece nto, tshem tawm cov plua plav thiab roj ntawm cov khoom nto, tso tawm qhov kev ntxhov siab, thiab tau txais ntau yam kev hloov kho ntawm lub workpiece nto.
Nws muaj feem xyuam rau roj hmab, iav, ceramic, hlau thiab lwm yam khoom, thiab yog siv rau microelectronics, LCD, LED, LCM, PCB Circuit Court board, semiconductor ntim, khoom siv kho mob, kev sim neej thiab lwm yam kev lag luam.