Akụrụngwa na-anabata nhazi ọnụ ụzọ ụzọ kwụ ọtọ na nhazi ụyọkọ.Enwere ike iji ya na isi mmalite evaporation maka ọla na ihe dị iche iche organic, ma nwee ike ikpochapụ wafer silicon nke nkọwa dị iche iche.Ejiri usoro nhazi nkenke nkenke, mkpuchi ahụ kwụsiri ike na mkpuchi ahụ nwere ike ikwughachi nke ọma.
Ngwa mkpuchi GX600 nwere ike ịpụpụ ihe ndị na-enye ọkụ ma ọ bụ ihe ọla n'ụzọ ziri ezi, n'ụzọ ziri ezi na nke ọma.Ọ nwere uru nke ịmepụta ihe nkiri dị mfe, ịdị ọcha dị elu na nnukwu compactness.Igwe ihe nkiri zuru oke na-akpaghị aka na usoro nlekota oge nwere ike hụ na nkwughachi na nkwụsi ike nke usoro ahụ.Ejiri ya rụọ ọrụ ịgbaze onwe ya iji belata ịdabere na nka onye ọrụ.
Enwere ike itinye ngwa ahụ na Cu, Al, Co, Cr, Au, Ag, Ni, Ti na ihe ndị ọzọ dị na ígwè, ma nwee ike kpuchie ya na ihe nkiri metal, ihe nkiri oyi akwa dielectric, ihe nkiri IMD, wdg. a na-ejikarị ya na semiconductor. ụlọ ọrụ, dị ka ngwaọrụ ike, semiconductor n'azụ nkwakọ ihe mkpuchi, wdg.
GX600 | GX900 |
φ600*800(mm) | φ900*H1050(mm) |