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Njirimara nke ihe nkiri mkpuchi sputtering

Isi mmalite edemede: Zhenhua vacuum
Gụọ:10
Ebipụtara: 23-03-09

① Ezi njikwa na repeatability nke ihe nkiri ọkpụrụkpụ

Ma enwere ike ịchịkwa oke ihe nkiri ahụ na uru a kara aka ka a na-akpọ njikwa ọkpụrụkpụ ihe nkiri.Enwere ike ịmegharị ọkpụrụkpụ ihe nkiri a chọrọ ugboro ugboro, nke a na-akpọ ihe ngosi ihe nkiri.Ya mere, ọkpụrụkpụ nke ihe nkiri sputtered bụ nke a na-achịkwa, na ihe nkiri ahụ nwere oke ibu nwere ike ịdebe nke ọma.Tụkwasị na nke ahụ, mkpuchi sputter nwere ike ịnweta ihe nkiri nwere oke nha na nnukwu elu.

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② Mgbakwunye siri ike n'etiti ihe nkiri na mkpụrụ

Ike nke atọm ndị a na-efesa efesa dị 1-2 n'usoro dị elu karịa nke atọm kpochapuru.Ntugharị ike nke atom ndị na-agbapụta ume dị elu na-edobere na mkpụrụ ahụ dị elu karịa nke atom ndị na-ekpochapụ, nke na-emepụta okpomọkụ dị elu ma na-eme ka adhesion dị n'etiti atom ndị na-agbapụta na mkpụrụ.Na mgbakwunye, ụfọdụ atom sputtered ike dị elu na-emepụta ogo ntụtụ dị iche iche, na-akpụ oyi akwa pseudodiffusion na mkpụrụ.Na mgbakwunye, a na-ehicha mkpụrụ ahụ mgbe niile ma na-arụ ọrụ na mpaghara plasma n'oge a na-emepụta ihe nkiri, nke na-ewepụ atom sputtering na nrapado na-adịghị ike, na-asachapụ ma na-arụ ọrụ n'elu ala.Ya mere, ihe nkiri sputtered nwere ike adhesion na mkpụrụ.

③ Enwere ike ịkwadebe ihe nkiri ihe ọhụrụ dị iche na ebumnuche

Ọ bụrụ na ewebata gas na-emeghachi omume n'oge sputtering iji mee ka ọ meghachi omume na ebumnuche, enwere ike nweta ihe nkiri ihe ọhụrụ dị iche kpamkpam na ebumnuche.Dịka ọmụmaatụ, a na-eji silicon dị ka ihe na-agbapụta agbapụ, a na-etinyekwa oxygen na argon n'ime oghere oghere ọnụ.Mgbe ịgbasasịrị, enwere ike nweta ihe nkiri mkpuchi mkpuchi SiOz.N'iji titanium dị ka ihe ebumpụta ụwa, a na-etinye nitrogen na argon n'ime oghere oghere ọnụ, enwere ike nweta ihe nkiri TiN dị ka ihe nkiri mgbe ọ gbasasịrị.

④ Ịdị ọcha dị elu na ihe nkiri dị mma

Ebe ọ bụ na ọ dịghị ihe na-emepụta ihe na-emepụta ihe na-emepụta ihe na-emepụta ihe nkiri na-emepụta ihe, a gaghị ejikọta ihe ndị na-ekpo ọkụ na-ekpo ọkụ na oyi akwa ihe nkiri.Ọdịmma nke mkpuchi sputtering bụ na fim na-akpụ ọsọ na-adị nwayọọ karịa nke mkpuchi evaporation, ọnọdụ okpomọkụ dị elu dị elu, ọ dị mfe ịnweta gas na-adịghị ọcha, na usoro ngwaọrụ dị mgbagwoju anya.

E bipụtara akụkọ a bụ Guangdong Zhenhua, onye na-emepụta iheakụrụngwa mkpuchi agụụ


Oge nzipu: Mar-09-2023