1. Igwe mkpuchi oghere cathode ion na igwe na-ekpo ọkụ waya arc ion mkpuchi
A na-etinye egbe cathode oghere na ọkụ waya arc egbe n'elu ụlọ mkpuchi ahụ, a na-etinye anode na ala, na-etinyekwa eriri abụọ electromagnetic n'elu na ala nke mkpuchi ụlọ mkpuchi. Igwe ọkụ Arc na-esi n'elu gaa na ala iji mee mmegharị ahịrị okirikiri.
2. Magnet na-adịgide adịgide gbakwunyere njikwa elektrọnik nke obere okirikiri cathode arc isi iyi
Igwe ikuku elektrọn na-eme ka ntụpọ arc accelerates na-eme ngagharị ngagharị na gburugburu ebe ebumnuche, nke na-ebelata oge obibi nke ntụpọ arc n'elu ebumnuche, na-ebelata ebe ọdọ mmiri a wụrụ awụ ma na-emezi nzukọ ihe nkiri ahụ.
3.Dual electromagnetic akara cathodic arc isi iyi
Isi iyi cathodic arc nwere coils electromagnetic abụọ, nke na-eme ka ịgbagharị ọsọ nke eletrọn anya ma na-emezi nzukọ oyi akwa ihe nkiri.
4.Magnetron Cyclotron PECVD
A na-etinye eriri eletrik abụọ n'èzí DC PECVD mkpuchi ụlọ iji mee ka electrons na-atụgharị, nke na-eme ka ohere nke esemokwu dị n'etiti electrons na gas, ma na-eme ka ọnụọgụ nke ihe dị na oyi akwa ihe nkiri dịkwuo mma.
5.ECR Microwave PECVD
Na mkpuchi ụlọ n'èzí arụnyere elu na ala na abụọ electromagnetic coils, nwere ike melite dissociation ọnụego.
6.Arc Light Discharge PECVD
Na arc mwepu PECVD akụrụngwa mkpuchi ụlọ gburugburu elu na ala ntinye nke abụọ electromagnetic coils, nkwụnye nke diamond film, na coaxial electromagnetic ubi nwere ike na-atụgharị arc electron eruba na-akpali gas ionization nke hydrocarbons.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Ọktoba 24-2023