PVD deposition technology e eme ruo ọtụtụ afọ dị ka a ọhụrụ elu mgbanwe technology, karịsịa agụụ ion mkpuchi technology, nke nweela nnukwu mmepe na-adịbeghị anya na ugbu a ọtụtụ ebe na ọgwụgwọ nke ngwaọrụ, ebu, piston yiri mgbaaka, gia na ndị ọzọ components. .Ihe mkpuchi mkpuchi nke teknụzụ mkpuchi vacuum ion kwadoro nke ọma nwere ike belata ọnụọgụ esemokwu, melite mgbochi iyi na ụfọdụ mgbochi corrosion, wee bụrụ ebe a na-elekwasị anya na ebe dị ọkụ nke nyocha n'ọhịa nke teknụzụ na-ewusi elu gia.
Ihe ndị a na-ejikarị eme ngwo bụ nchara nchara, igwe nkedo, igwe nkedo, ọla ndị na-abụghị igwe (ọla kọpa, aluminom) na rọba.Steel bụ isi 45 steel, 35SiMn, 40Cr, 40CrNi, 40MnB, 38CrMoAl.Carbon ígwè dị ala na-ejikarị na 20Cr, 20CrMnTi, 20MnB, 20CrMnTo.A na-eji igwe akpụ akpụ eme ihe n'ọtụtụ ebe n'ihi na ọ na-arụ ọrụ nke ọma, ebe a na-ejikarị ígwè nkedo na-emepụta gia nwere dayameta> 400mm na usoro mgbagwoju anya.Nkedo ígwè gia mgbochi gluu na pitting eguzogide, ma enweghị mmetụta na-eyi na-eguzogide, tumadi maka kwụsiri ike na-arụ ọrụ, ike abụghị obere ọsọ ma ọ bụ nnukwu size na mgbagwoju udi, nwere ike na-arụ ọrụ n'okpuru ọnọdụ nke enweghị lubrication , adabara na-emeghe. nnyefe.Ọla ndị na-adịghị ferrous a na-ejikarị bụ tin bronze, aluminum-iron bronze and casting aluminum alloy, nke a na-ejikarị emepụta turbines ma ọ bụ gia, ma ihe eji eme ihe na ihe mgbochi adịghị mma, naanị maka ọkụ, ọkara ibu na obere ọsọ. gia.A na-ejikarị ihe eji eme ihe na-abụghị ọla na mpaghara ụfọdụ nwere ihe pụrụ iche chọrọ, dị ka mmanu na-enweghị mmanụ na ntụkwasị obi dị elu.Mpaghara ọnọdụ dị ka mmetọ dị ala, dị ka ngwa ụlọ, ngwa ahụike, igwe nri na igwe akwa.
Ihe mkpuchi gia
Injinia seramiiki ihe bụ ihe na-ekwe nkwa nke ukwuu na ike dị elu na ike siri ike, ọkachasị ezigbo nguzogide okpomọkụ, obere ikuku ọkụ na mgbasawanye thermal, akwa mkpuchi mkpuchi na nguzogide oxidation.Ọnụ ọgụgụ dị ukwuu nke ọmụmụ egosiwo na ihe ndị dị na seramiiki na-ekpo ọkụ na-ekpo ọkụ ma na-eyi obere ọla.Ya mere, ojiji nke seramiiki ihe kama ígwè ihe maka eyi-eguzogide akụkụ nwere ike imeziwanye ndụ nke esemokwu sub, nwere ike izute ụfọdụ nke elu okpomọkụ na elu eyi na-eguzogide ihe, multi-arụ ọrụ na ndị ọzọ siri ike chọrọ.Ka ọ dị ugbu a, a na-eji ihe ndị na-emepụta ihe na-emepụta ihe na-emepụta ihe ndị na-emepụta ihe na-emepụta ihe ndị na-emepụta ihe na-ekpo ọkụ na engine, nnyefe ígwè ọrụ na akụkụ ndị na-eyi, ngwá ọrụ kemịkalụ na akụkụ ndị na-eguzogide corrosion na akụkụ akara, na-egosiwanye ngwa ngwa nke ihe ndị dị na seramiiki atụmanya.
Mba ndị mepere emepe dị ka Germany, Japan, United States, United Kingdom na mba ndị ọzọ na-etinye aka dị ukwuu na mmepe na ngwa nke ihe seramiiki injinia, na-etinye nnukwu ego na ikike iji zụlite usoro nhazi na nkà na ụzụ nke ceramics engineering.Germany ewepụtala mmemme akpọrọ “SFB442″, ebumnuche ya bụ iji teknụzụ PVD rụpụta ihe nkiri dabara adaba n'elu akụkụ ahụ iji dochie ihe nwere ike imebi mmanu gburugburu na ahụ mmadụ.PW Gold na ndị ọzọ nọ na Germany jiri ego sitere na SFB442 tinye teknụzụ PVD iji tinye ihe nkiri ndị dị mkpa n'elu ebe a na-agbagharị agbagharị wee chọpụta na arụrụ ọrụ mgbochi iyi nke ịgbagharị agbagharị agbagoro nke ọma na ihe nkiri ndị edobere n'elu nwere ike dochie ya kpamkpam. ọrụ nke oke nrụgide mgbochi iyi ihe mgbakwunye.Joachim, Franz et al.na Germany jiri teknụzụ PVD kwadebe ihe nkiri WC/C na-egosi ihe ndị na-egbochi ike ọgwụgwụ dị mma, dị elu karịa nke mmanụ mmanu nwere ihe mgbakwunye EP, nke na-eme ka ohere nke iji mkpuchi dochie ihe mgbakwunye na-emerụ ahụ.E. Lugscheider et al.nke Institute of Materials Science, Technical University of Aachen, Germany, na ego sitere na DFG (GermanResearch Commission), gosipụtara mmụba dị ịrịba ama na nguzogide ike ọgwụgwụ mgbe etinyere ihe nkiri kwesịrị ekwesị na 100Cr6 ígwè site na iji teknụzụ PVD.Na mgbakwunye, United States General Motors amalitela na VolvoS80Turbo ụdị ụgbọ ala gia elu deposition film iji melite ike ọgwụgwụ pitting iguzogide;ụlọ ọrụ Timken a ma ama ewepụtala aha ES200 gear surface film;Edebanyere aha ụghalaahịa MAXIT gear mkpuchi apụtala na Germany;ụghalaahịa edenyere n'akwụkwọ ikikere Graphit-iC na Dymon-iC n'otu n'otu Gear mkpuchi nwere akara ụghalaahịa edenyere n'akwụkwọ ikikere Graphit-iC na Dymon-iC dịkwa na UK.
Dị ka akụkụ dị mkpa nke nnyefe igwe, gia na-arụ ọrụ dị mkpa na ụlọ ọrụ, n'ihi ya, ọ dị ezigbo mkpa na-amụ banyere ngwa nke seramiiki ihe na gia.Ka ọ dị ugbu a, seramiiki injinia etinyere na gia bụ ihe ndị a.
1, TiN mkpuchi oyi akwa
1, TiN
Ion mkpuchi TiN seramiiki oyi akwa bụ otu n'ime ihe ndị kasị n'ọtụtụ ebe na-eji elu gbanwetụrụ coatings na elu hardness, elu adhesion ike, ala esemokwu ọnụọgụ, ezi corrosion eguzogide, wdg Ọ e ọtụtụ-eji na dị iche iche ubi, karịsịa na ngwá ọrụ na ebu ụlọ ọrụ.Isi ihe na-emetụta ntinye nke mkpuchi seramiiki na gia bụ nsogbu njikọ n'etiti mkpuchi seramiiki na mkpụrụ.Ebe ọ bụ na ọnọdụ ọrụ na ihe ndị na-emetụta gia dị nnọọ mgbagwoju anya karịa nke ngwá ọrụ na ihe ọkpụkpụ, ntinye nke otu mkpuchi TiN na ọgwụgwọ elu gia bụ nke ukwuu.Ọ bụ ezie na mkpuchi seramiiki nwere uru nke ịdị elu siri ike, obere esemokwu esemokwu na nguzogide corrosion, ọ na-agbaji ma sie ike ịnweta mkpuchi siri ike, n'ihi ya, ọ chọrọ akwa siri ike na ike dị elu iji kwado mkpuchi ahụ iji kpọọ àgwà ya.Ya mere, a na-ejikarị mkpuchi seramiiki eme ihe maka carbide na elu ígwè dị elu.Ihe eji eme ihe dị nro ma e jiri ya tụnyere ihe seramiiki, na ọdịiche dị n'etiti ọdịdị nke ihe mkpuchi na mkpuchi dị ukwuu, ya mere nchikota nke mkpuchi na ihe mkpuchi adịghị mma, na mkpuchi ezughị ezu iji kwado mkpuchi ahụ, na-eme ihe mkpuchi ahụ dị mfe ịdaba na usoro eji eme ihe, ọ bụghị naanị na ọ pụghị igwu uru nke mkpuchi seramiiki, ma ihe mkpuchi seramiiki nke na-adapụ ga-eme ka abrasive na-eyi na ngwo ahụ, na-eme ka ọkpụkpụ na-efunahụ ngwa ngwa.Ihe ngwọta dị ugbu a bụ iji teknụzụ ọgwụgwọ elu ihe mejupụtara iji meziwanye njikọ dị n'etiti seramiiki na mkpụrụ.Teknụzụ na-ahụ maka ọgwụgwọ n'elu jikọtara ọnụ na-ezo aka na nchikota mkpuchi mkpuchi ikuku anụ ahụ na usoro ọgwụgwọ elu ndị ọzọ ma ọ bụ mkpuchi, na-eji ihu abụọ dị iche iche / ihe dị n'okpuru iji gbanwee elu nke mkpụrụ osisi ahụ iji nweta ihe ndị mejupụtara ihe mejupụtara nke enweghị ike nweta site na otu usoro ọgwụgwọ elu. .Ihe mkpuchi ihe mejupụtara TiN nke ion nitriding na PVD na-etinye bụ otu n'ime mkpuchi ihe mejupụtara nyocha kachasị.Ngwakọta nitriding plasma na mkpuchi seramiiki TiN nwere njikọ siri ike yana nguzogide iyi na-abawanye nke ọma.
The ezigbo ọkpụrụkpụ nke TiN film oyi akwa na magburu onwe eyi na-eguzogide na ihe nkiri base bonding bụ banyere 3 ~ 4μm.Ọ bụrụ na ọkpụrụkpụ nke oyi akwa ihe nkiri na-erughị 2μm, a gaghị emeziwanye nguzogide eyi.Ọ bụrụ na ọkpụrụkpụ nke ihe nkiri oyi akwa karịrị 5μm, a ga-ebelata njikọ njikọ ihe nkiri ahụ.
2, Multi-oyi akwa, multi-mpaghara TiN mkpuchi
Site na ntinye nke ntanye nke TiN nke nta nke nta na nke zuru ebe nile, a na-enwekwu nyocha banyere otu esi emeziwanye ma kwalite mkpuchi TiN.N'ime afọ ndị na-adịbeghị anya, a na-emepụta ihe mkpuchi nke multi-component na multilayer na-adabere na ọnụọgụ abụọ TiN, dị ka Ti-CN, Ti-CNB, Ti-Al-N, Ti-BN, (Tix, Cr1-x) N, TiN. / Al2O3, wdg Site n'ịgbakwụnye ihe ndị dị ka Al na Si na mkpuchi TiN, a na-eme ka nkwụsị nke ikuku oxidation dị elu na ike nke mkpuchi ahụ dịkwuo mma, ebe ị na-agbakwụnye ihe ndị dị ka B nwere ike imeziwanye ike na ike nke mkpuchi nke mkpuchi.
N'ihi mgbagwoju anya nke ihe mejupụtara multicomponent, enwere ọtụtụ esemokwu na ọmụmụ ihe a.Na nyocha nke (Tix, Cr1-x) N mkpuchi multicomponent, enwere nnukwu esemokwu na nsonaazụ nyocha.Ụfọdụ ndị kwenyere na mkpuchi (Tix, Cr1-x) N dabere na TiN, na Cr nwere ike ịdị naanị n'ụdị ngbanwe siri ike ngwọta na TiN dot matrix, ma ọ bụghị dị ka usoro CrN dị iche.Nnyocha ndị ọzọ na-egosi na ọnụ ọgụgụ nke Cr atom na-anọchi anya Ti atom na (Tix, Cr1-x) N mkpuchi nwere oke, na Cr fọdụrụnụ dị na steeti singlet ma ọ bụ mepụta ogige na N. Nsonaazụ nnwale na-egosi na mgbakwunye nke Cr. na mkpuchi ahụ na-ebelata oke ihe dị n'elu ma na-eme ka ike sie ike, na ike nke mkpuchi ahụ na-erute uru kachasị elu mgbe ọnụ ọgụgụ nke Cr ruru 3l%, ma nrụgide dị n'ime nke mkpuchi ahụ na-erukwa oke uru.
3. Ndị ọzọ mkpuchi oyi akwa
Na mgbakwunye na mkpuchi TiN a na-ejikarị eme ihe, a na-eji ọtụtụ ceramik injinịa dị iche iche na-ewusi elu ala ike.
(1) Y.Terauchi et al.nke Japan mụọ nguzogide mgbakasị ahụ nke titanium carbide ma ọ bụ titanium nitride ceramic gears nke usoro mbusa uzuoku edobere.The Gears e carburized na polished iji nweta a n'elu hardness nke ihe dị ka HV720 na a elu roughness nke 2.4 μm tupu mkpuchi, na seramiiki mkpuchi bụ nke a kwadebere site na kemịkalụ vapor deposition (CVD) maka titanium carbide na site na anụ ahụ vepor deposition (PVD) maka. titanium nitride, nke nwere ihe nkiri seramiiki nke ihe dịka 2 μm.A na-enyocha ihe eji eme ihe na-akpata esemokwu n'ihu mmanụ na esemokwu akọrọ, n'otu n'otu.Achọpụtara na nguzogide galling na nkwụsi ike nke gear vice ka agbanyere nke ọma ka ejiri seramiiki kpuchie ya.
(2) A na-akwadebe ihe mkpuchi nke Ni-P na TiN nwere kemịkalụ site na mkpuchi Ni-P dị ka oyi akwa mgbanwe wee tinye TiN.Ọmụmụ ihe na-egosi na a na-emeziwanye ike elu nke mkpuchi ihe a na-ejikọta ọnụ ruo n'ókè ụfọdụ, na mkpuchi ahụ na-ejikọta ya na mkpụrụ osisi ahụ ma nwee ike iyi ka ọ dị mma.
(3) WC/C, ihe nkiri B4C dị mkpa
M. Murakawa et al., Department of Mechanical Engineering, Japan Institute of Technology, ji PVD technology na-edebe WC / C mkpa film n'elu gia, na ya ọrụ ndụ bụ ugboro atọ nke nkịtị quenched na ala gia n'okpuru mmanụ- ọnọdụ mmanu mmanu n'efu.Franz J et al.ejiri teknụzụ PVD tinye WC / C na B4C ihe nkiri dị mkpa n'elu FEZ-A na FEZ-C gears, nnwale ahụ gosipụtara na mkpuchi PVD belatara esemokwu gia nke ukwuu, na-eme ka ngwa ahụ ghara ịdị mfe ijikọ ọkụ ma ọ bụ gluing, ma kwalite ikike ibu nke ngwa ahụ.
(4) Ihe nkiri CrN
Ihe nkiri CrN yiri ihe nkiri TiN n'ihi na ha nwere isi ike dị elu, na ihe nkiri CrN na-eguzogide ọgwụ oxidation dị elu karịa TiN, nwere nguzogide corrosion ka mma, nrụgide dị n'ime ya dị ala karịa ihe nkiri TiN, yana ịdị ike dịtụ mma.Chen Ling et kwadebere ihe nkiri TiAlCrN/CrN na-eguzogide na-eyi ihe nkiri nwere njikọ dị mma nke dabeere na ihe nkiri n'elu HSS, ma tụpụtakwa echiche dislocation stacking theory of multilayer film, ma ọ bụrụ na dislocation ike dị iche n'etiti abụọ n'ígwé buru ibu, dislocation na-eme. n'otu oyi akwa ga-esi ike ịgafe interface ya n'ime oyi akwa nke ọzọ, si otú a na-emepụta nkwụsịtụ na-agbakọta na interface ma na-arụ ọrụ nke iwusi ihe onwunwe ike.Zhong Bin et mụrụ mmetụta nke ọdịnaya nitrogen na nhazi nke usoro yana ihe eji eme ihe nkiri CrNx, ọmụmụ ahụ gosikwara na ọnụ ọgụgụ dị elu nke Cr2N (211) dị na fim ahụ ji nwayọọ nwayọọ daa mbà na ọnụ ọgụgụ CrN (220) ji nwayọọ nwayọọ na-abawanye site na mmụba. nke ọdịnaya N2, nnukwu ihe dị n'elu ihe nkiri ahụ ji nwayọọ nwayọọ na-ebelata ma elu na-adị larịị.Mgbe N2 aeration bụ 25 ml / min (isi iyi arc ugbu a bụ 75 A, ihe nkiri CrN echekwara nwere ezigbo mma elu, ịdị mma siri ike na nguzogide dị mma mgbe N2 aeration bụ 25ml / min (isi iyi arc ugbu a bụ 75A, adịghị mma nrụgide bụ 100V).
(5) Ihe nkiri siri ike
Ihe nkiri Superhard bụ ihe nkiri siri ike nke nwere isi ike karịa 40GPa, ezigbo nguzogide eyi, oke okpomọkụ na oke esemokwu dị ala na ọnụọgụ mgbasawanye ọkụ dị ala, ọkachasị ihe nkiri diamond amorphous na ihe nkiri CN.Ihe nkiri diamond amorphous nwere ihe amorphous, enweghị usoro iwu ogologo ogologo, ma nwee ọnụ ọgụgụ buru ibu nke CC tetrahedral bond, ya mere a na-akpọkwa ha tetrahedral amorphous carbon films.Dị ka ụdị ihe nkiri carbon amorphous amorphous, mkpuchi dị ka diamond (DLC) nwere ọtụtụ ihe magburu onwe ya dị ka diamond, dị ka elu thermal conductivity, elu ike ike, elu na-agbanwe modul, obere ọnụọgụ nke mgbasawanye thermal, ezigbo nkwụsi ike kemịkalụ, ezigbo mgbochi iyi na ọnụ ala esemokwu.E gosiputara na ikpuchi ihe nkiri dị ka diamond n'elu gia nwere ike ịgbatị ndụ ọrụ site na nkeji 6 ma mee ka ike ọgwụgwụ dịkwuo elu.Ihe nkiri CN, nke a makwaara dị ka ihe nkiri carbon-nitrogen amorphous, nwere usoro kristal yiri nke β-Si3N4 covalent ogige ma marakwa dị ka β-C3N4.Liu na Cohen et al.rụrụ rigorous theoretical mgbako site na iji pseudopotential band mgbako si mbụ-nature ụkpụrụ , kwadoro na β-C3N4 nwere nnukwu njikọ ike, a kwụsiri ike n'ibu Ọdịdị, ọ dịkarịa ala otu sub-stable ala nwere ike ịdị, na ya na-agbanwe modulus bụ tụnyere diamond, nwere ezigbo ihe, nke nwere ike melite ike elu nke ọma ma na-eyi nguzogide nke ihe ma belata ọnụọgụ esemokwu.
(6) Ihe mkpuchi mkpuchi alloy ndị ọzọ na-eguzogide
A nwalekwara ụfọdụ mkpuchi mkpuchi na-eguzogide alloy ka etinyere ya na gia, dịka ọmụmaatụ, ntinye nke Ni-P-Co alloy oyi akwa n'elu eze nke 45 # ígwè gia bụ ihe mkpuchi alloy iji nweta nzukọ ọka dị mma, nke nwere ike ịgbatị ndụ ruo 1.144 ~ 1.533 ugboro.A mụọkwara ya na a na-etinye akwa oyi akwa Cu metal na mkpuchi Ni-W n'elu eze nke Cu-Cr-P alloy cast iron gear iji meziwanye ike ya;A na-etinye mkpuchi Ni-W na Ni-Co n'elu nha nha nha nke HT250 nkedo ígwè iji meziwanye nguzogide eyi site na ugboro 4 ~ 6 ma e jiri ya tụnyere ngwa na-enweghị mkpuchi.
Oge nzipu: Nov-07-2022