Okwu mmeghe nke oghere vapor, sputtering na mkpuchi ion

Mkpuchi mkpuchi na-agụnye ntinye oghere oghere, mkpuchi sputtering na mkpuchi ion, ihe niile a na-eji na-etinye ihe nkiri metal dị iche iche na nke na-abụghị metal n'elu akụkụ plastik site na distillation ma ọ bụ sputtering n'okpuru ọnọdụ agụụ, nke nwere ike nweta mkpuchi elu dị oke mkpa. na uru pụtara ìhè nke ngwa ngwa adhesion, ma ọnụahịa dịkwa elu, na ụdị ọla ndị nwere ike ịrụ ọrụ dị ntakịrị, a na-ejikarị eme ihe maka mkpuchi ọrụ nke ngwaahịa dị elu.

Ngwunye vapor Vacuum bụ usoro ikpo ọkụ metal n'okpuru oghere dị elu, na-eme ka ọ gbazee, kpochapu, ma mepụta ihe nkiri metal dị mkpa n'elu ihe nlele ahụ mgbe ọ dị jụụ, na ọkpụrụkpụ nke 0.8-1.2 um.Ọ na-ejuputa na obere concave na convex akụkụ n'elu nke ngwaahịa kpụrụ iji nweta a mirror-dị ka enyo. Mgbe a na-eme ka ikuku vapor deposition na-arụ ọrụ ma ọ bụ iji nweta mmetụta enyo na-egbuke egbuke ma ọ bụ na-ekpochapụ ihe nchara na-eji obere ntachi anya, ala ala. a ga-ekpuchiri ya.

Ịgbasa na-ezokarị aka na magnetron sputtering, nke bụ usoro ịgbasa ọkụ dị ala nke dị elu.Usoro a na-achọ oghere nke ihe dịka 1 × 10-3Torr, nke ahụ bụ 1.3 × 10-3Pa oghere steeti jupụtara na argon gas inert (Ar), na n'etiti mkpụrụ osisi plastik (anode) na ihe mgbanaka ígwè (cathode) gbakwunyere elu voltaji. ugbu a kpọmkwem, n'ihi mkpali eletrọn nke gas inert nke na-emepụta site na mwepu na-egbuke egbuke, na-emepụta plasma, plasma ga-agbawa atom nke ihe mgbaru ọsọ ígwè ma tinye ha na rọba.Ọtụtụ n'ime mkpuchi ọla n'ozuzu na-eji DC sputtering, ebe seramiiki na-adịghị eduzi na-eji RF AC sputtering.

Ihe mkpuchi ion bụ usoro nke a na-eji mwepu gas na-eme ka ionize gas ma ọ bụ ihe na-ekpo ọkụ n'okpuru ọnọdụ ohere, na ihe na-ekpochapụ ma ọ bụ ihe na-emegharị ya na-edobe na mkpụrụ site na bombu nke ion gas ma ọ bụ ion nke ihe a kpochapuru.Ndị a na-agụnye mkpuchi magnetron sputtering ion mkpuchi, mkpuchi ion reactive, oghere cathode mwepu ion mkpuchi (usoro oghere cathode vepor deposition), na mkpuchi multi-arc ion (nkpuchi cathode arc ion).

Magnetron nwere akụkụ kwụ ọtọ na-efesa mkpuchi na-aga n'ihu n'ahịrị
Enwere ike iji ngwa ngwa zuru oke, maka ngwaahịa eletrọnịkị dị ka oyi akwa mkpuchi shei EMI, ngwaahịa dị larịị, na ngwaahịa iko oriọna niile n'ime nkọwapụta dị elu nwere ike imepụta.Ikike ibu ibu, kọmpat clamping na staggered clamping nke conical ìhè iko maka mkpuchi ihu abụọ, nke nwere ike ibu ibu ibu ikike.Ọdịmma kwụsiri ike, ịdị mma nke oyi akwa ihe nkiri sitere na ogbe ruo na ogbe.Ọkwa dị elu nke akpaaka yana ọnụ ala ọrụ na-agba ọsọ.