Usoro Usoro nke igwe mkpuchi mkpuchi sputtering

1. Ntucha ihicha bombu

1.1) Igwe mkpuchi mkpuchi na-eji ihe na-egbuke egbuke na-ehicha mkpụrụ.Nke ahụ bụ, na-ebunye argon gas n'ime ụlọ ahụ, voltaji mgbaba dị gburugburu 1000V, Mgbe ịgbanye ọkụ ọkụ, a na-eme ka ọkụ na-egbuke egbuke, na-ehichapụkwa mkpụrụ ahụ site na bombu argon ion.

1.2) N'ime igwe mkpuchi mkpuchi sputtering nke na-emepụta ihe ịchọ mma dị elu, ion titanium na-emepụta site na obere isi iyi arc na-ejikarị eme ihe maka nhicha.A na-eji igwe mkpuchi na-agbapụta sputtering nwere obere isi iyi, na iyi titanium ion dị na plasma arc nke obere arc na-emepụta na-eji bombard na hichaa mkpụrụ ahụ.

2. Titanium nitride mkpuchi

Mgbe ị na-etinye titanium nitride ihe nkiri dị gịrịgịrị, ihe ebumnuche maka ịgbasa bụ ebumnuche titanium.A na-ejikọta ihe ezubere iche na electrode na-adịghị mma nke ike ọkụ na-agbapụta, na voltaji ebu n'obi bụ 400 ~ 500V;A na-edozi ikuku argon, na oghere nchịkwa bụ (3 ~ 8) x10^-1PA.A na-ejikọta mkpụrụ ahụ na electrode na-adịghị mma nke ike ọkụ na-adịghị mma, na voltaji nke 100 ~ 200V.

Mgbe ịgbanwusịrị ike nke titanium ebumnuche sputtering, a na-emepụta mwepu na-egbuke egbuke, argon ion ume dị elu na-atụkwasa ebumnobi na-agbapụta, na-agbapụta atom titanium site na ebumnuche.

A na-ewebata nitrogen mmeghachi omume, na atom titanium na nitrogen na-ionized n'ime ion titanium na ion nitrogen n'ime ụlọ mkpuchi.N'okpuru mma nke eletrọnkị eletrịkị na-adịghị mma etinyere na mkpụrụ, ion titanium na ion nitrogen na-eme ngwa ngwa n'elu mkpụrụ maka mmeghachi omume kemịkalụ na ntinye iji mepụta oyi akwa ihe nkiri titanium nitride.

3. Wepụ mkpụrụ osisi ahụ

Mgbe ị nwetasịrị ọkpụrụkpụ ihe nkiri ahụ agbagoro agbagoro, gbanyụọ ọkụ na-agbasa, ọkọnọ ike na-adịghị mma, na isi iyi ikuku.Mgbe mkpụrụ osisi dị ala karịa 120 ℃, jupụta ụlọ mkpuchi na ikuku wee wepụ mkpụrụ ahụ.

E bipụtara akụkọ amagnetron sputtering mkpuchi igwe emeputa- Guangdong Zhenhua.