Usoro nke oghere cathode ion mkpuchi

Usoro mkpuchi oghere cathode ion bụ nke a:

1. Tinye Chin ingots na ọdịda.

2. Ịkwalite workpiece.

3, Mgbe evacuating ka 5 × 10-3Pa, argon gas na-ẹkenam n'ime mkpuchi ụlọ si ọlaọcha tube, na agụụ larịị bụ gburugburu 100Pa.

4, Gbanwuo ike eleghi anya.

5, Mgbe mbịne na arc ike igbanye oghere cathode ihapu.The glow ihapu na-eme na bọtịnụ tube, Ikwasa voltaji bụ 800 ~ 1000V, The arc-ịzụlite ugbu a bụ 30 ~ 50A.Due ka oghere cathode mmetụta nke glow. mwepu, Njupụta dị elu na-egbuke egbuke ugbu a, njupụta dị elu nke oke ions na tube ọlaọcha na-atụ bọmbụ na mgbidi nke tube vantage, mee ka mgbidi tube dị ngwa ngwa ruo n'ife nke electron, ọnọdụ nkwụsị site na ọkụ ọkụ na-agbanwe na mberede arc ihapu,Voltaji bụ 40 ~ 70V, Ugbu a bụ 80 ~ 300A. Silver tube okpomọkụ erute n'elu 2300K, Incandescent, Emits a elu njupụta iyi nke arc electrons si tube, na gbara na anode.

6, Adjustment nke agụụ level.The agụụ larịị maka glow ihapu si oghere cathode egbe bụ banyere 100 Pa, na agụụ ogo mkpuchi bụ 8 × 10-1 ~ 2Pa.Ya mere, Mgbe mgbanye nke arc ihapu, Belata na-abata argon gas ngwa ngwa o kwere mee, Gbanwee oghere oghere ka ọ bụrụ ebe kwesịrị ekwesị maka mkpuchi.

7, Titanium plated isi Layer.Electron eruba jidesie anodically dara chin metal ingot,Ntụgharị nke kinetic ike thermal ike,Evaporation nke Chin metal site kpo oku,Vapor atọm iru workpiece na-etolite a titanium film.

8, Deposition nke TiN.Nitrogen gas na-ọnọ na mkpuchi ụlọ,Nitrogen gas na evaporated atọm na-ionized n'ime nitrogen na titanium ion.Above na crucible, elu puru omume nke inelastic collisions nke titanium vepor atọm na ok iyi nke ala-ike electrons, The metal dissociation ọnụego dị elu dị ka 20% ~ 40%, Titanium ion na-yikarịrị ime chemically na mmeghachi omume gas nitrogen, Deposition nweta a nitride mantle film Layer. The oghere cathode egbe bụ ma a vaporization isi iyi, ọzọ isi iyi. nke ionization.N'oge mkpuchi, The ugbu a nke electromagnetic eriri igwe gburugburu crucible kwesịkwara ịgbanwe, Lekwasị anya na electron doo na etiti nke ọdịda, Ya mere, ike njupụta nke electron eruba na-abawanye.

9, Power Off.Mgbe film ọkpụrụkpụ esịmde predetermined film ọkpụrụkpụ, Gbanyụọ aak ike ọkọnọ, Bias ike ọkọnọ na ikuku ọkọnọ.