Vacuum magnetron sputtering dabara adaba karịsịa maka mkpuchi nkwụnyeghachi ihe.N'ezie, usoro a nwere ike idobe ihe nkiri dị mkpa nke ihe ọ bụla oxide, carbide na nitride.Ke adianade do, usoro bụkwa karịsịa adabara deposition nke multilayer film owuwu, gụnyere ngwa anya aghụghọ, agba fim, eyi na-eguzogide coatings, nano-laminates, superlatice coatings, insulating fim, wdg Dị ka n'oge dị ka 1970, elu àgwà ngwa anya film. ewepụtara ihe atụ ntinye maka ihe dị iche iche nke ihe nkiri oyi akwa.Ihe ndị a na-agụnye ihe ndị na-eduzi transperent, semiconductor, polymers, oxides, carbides, na nitrides, ebe a na-eji fluorides mee ihe na usoro dịka mkpuchi evaporative.
Isi uru nke usoro sputter magnetron bụ iji usoro mkpuchi reactive ma ọ bụ nke na-adịghị arụ ọrụ iji tinye akwa nke ihe ndị a na njikwa nke ọma nke ihe mejupụtara oyi akwa, ọkpụrụkpụ ihe nkiri, ịdị n'otu ihe nkiri na akụrụngwa akụrụngwa nke oyi akwa.Usoro nwere njirimara dị ka ndị a.
1. Nnukwu ntinye ego ọnụego.N'ihi iji ngwa ngwa magnetron electrodes dị elu, enwere ike ịnweta nnukwu ion ion, na-emeziwanye ọnụego ntinye ego na mgbasa ozi nke usoro mkpuchi a nke ọma.N'iji ya na usoro mkpuchi mkpuchi ndị ọzọ, magnetron sputtering nwere ikike dị elu na mkpụrụ dị elu, a na-ejikwa ya na mmepụta ụlọ ọrụ dị iche iche.
2, High ike arụmọrụ.Mgbasa mgbaba Magnetron n'ozuzu na-ahọrọ voltaji n'ime oke 200V-1000V, na-abụkarị 600V, n'ihi na voltaji nke 600V bụ naanị n'ime oke nrụpụta ike kachasị elu.
3. Obere sputtering ume.A na-etinye voltaji ebumnuche magnetron dị ala, ebe ndọta ahụ na-egbochi plasma dị nso na cathode, nke na-egbochi ụmụ irighiri ike dị elu ịmalite na mkpụrụ.
4. Ala substrate okpomọkụ.Enwere ike iji anode na-eduzi ndị electrons ndị a na-emepụta n'oge a na-apụ apụ, ọ dịghị mkpa nkwado nkwado ahụ iji wuchaa, nke nwere ike ibelata bọmbụ electron nke mkpụrụ ahụ.Ya mere, ọnọdụ okpomọkụ dị ala dị ala, nke dị mma maka ụfọdụ ihe ndị na-emepụta plastik na-adịghị eguzogide ọgwụ dị elu.
5, Magnetron sputtering lekwasịrị anya n'elu etching abụghị edo.Magnetron sputtering lekwasịrị anya n'elu etching enweghị isi bụ nke na-ekwekọghị ekwekọ oghere nke ebumnuche.Ọnọdụ nke ọnụego etching ebum n'obi buru ibu, nke mere na ọnụego ojiji nke ọma dị ala (naanị 20-30% ọnụego ojiji).Ya mere, iji meziwanye ojiji ebumnuche, ọ dị mkpa ka a gbanwee nkesa magnetik site n'ụzọ ụfọdụ, ma ọ bụ iji magnet na-akpụ akpụ na cathode nwekwara ike imeziwanye ojiji ebumnuche.
6. Ngwakọta lekwasịrị anya.Nwere ike ime ihe mejupụtara lekwasịrị anya mkpuchi alloy film.Ka ọ dị ugbu a, ejirila usoro mgbasa ozi magnetron ihe mejupụtara ya emechie nke ọma na ihe nkiri Ta-Ti alloy, (Tb-Dy)-Fe na Gb-Co alloy.Nhazi ebumnuche agwakọtara nwere ụdị anọ, n'otu n'otu, bụ ebumnuche agbakwunyere okirikiri, ebumnuche agbakwunyere square, ebumnuche agbakwunyere square na mpaghara etinyeghị ebumnuche.Ojiji nke ngalaba etinyere ebumnuche ebumnuche ka mma.
7. Nnukwu ngwa ngwa.Usoro sputtering Magnetron nwere ike idobe ọtụtụ ihe, ndị nkịtị bụ: Ag, Au, C, Co, Cu, Fe, Ge, Mo, Nb, Ni, Os, Cr, Pd, Pt, Re, Rh, Si, Ta, Ti , Zr, SiO, AlO, GaAs, U, W, SnO, wdg.
Magnetron sputtering bụ otu n'ime usoro mkpuchi a na-ejikarị eme ihe iji nweta ihe nkiri dị elu.Site na cathode ọhụrụ, ọ nwere ojiji ebumnuche dị elu yana ọnụego nkwụnye ego dị elu.Guangdong Zhenhua Technology agụụ magnetron sputtering mkpuchi usoro ugbu a ọtụtụ-eji na mkpuchi nke nnukwu-mpaghara substrates.A naghị eji usoro a eme ihe maka ntinye ihe nkiri nke otu oyi akwa, kamakwa maka mkpuchi ihe nkiri multi-layer, na mgbakwunye, a na-ejikwa ya na mpịakọta mpịakọta maka ihe nkiri nkwakọ ngwaahịa, ihe nkiri anya, lamination na mkpuchi ihe nkiri ndị ọzọ.
Oge nzipu: Nov-07-2022