Kedu ihe ndị na-emetụta nsi lekwasịrị anya na magnetron sputtering?

1, Ịmepụta ogige ígwè n'elu ebumnuche
Ebee ka a na-emepụta ihe na-eme ka a na-emepụta ihe na-esi n'elu igwe lekwasịrị anya n'elu site na usoro ịgbasa ume?Ebe ọ bụ na mmeghachi omume kemịkalụ dị n'etiti ụmụ irighiri gas na-emeghachi omume na atom ndị a na-eche n'elu na-emepụta atom, nke na-abụkarị exothermic, okpomọkụ mmeghachi omume ga-enwerịrị ụzọ isi pụta, ma ọ bụghị mmeghachi omume kemịkalụ enweghị ike ịga n'ihu.N'okpuru ọnọdụ oghere, nnyefe ọkụ n'etiti gas agaghị ekwe omume, ya mere mmeghachi omume kemịkal ga-ewere ọnọdụ n'elu elu siri ike.Mgbasa mmeghachi omume na-ebute ogige n'elu ebumnobi ezubere iche, n'elu ala, na ebe arụrụ arụ ndị ọzọ.Ịmepụta ogige dị n'elu ala bụ ihe mgbaru ọsọ, ịmepụta ogige n'elu ihe nhazi ndị ọzọ bụ ihe efu nke ihe onwunwe, na ịmepụta ogige n'elu ebe a na-achọsi ike na-amalite dị ka isi iyi nke atom atom ma ghọọ ihe mgbochi na-aga n'ihu na-enyekwu atom.

2, Mmetụta mmetụta nke nsi lekwasịrị anya
Isi ihe na-emetụta nsi e lekwasịrị anya bụ oke nke mmeghachi omume gas na gas na-efesa, oke mmeghachi omume gas ga-eduga n'ịgbu nsị.A na-eme usoro mgbasa ozi na-arụ ọrụ na mpaghara ọwa sputtering lekwasịrị anya na-egosi na a ga-ekpuchi ya site na ngwakọta mmeghachi omume ma ọ bụ na-eyipụ ihe mmeghachi omume ahụ ma kpughee elu igwe.Ọ bụrụ na ọnụ ọgụgụ nke mmepụta ihe dị ukwuu karịa ọnụ ọgụgụ nke ịdọpụ ihe, mpaghara mkpuchi ihe na-abawanye.N'otu ike, ọnụọgụ mmeghachi omume gas na-etinye aka na mmepụta ihe na-abawanye na ọnụọgụ nke mmepụta ihe na-abawanye.Ọ bụrụ na ọnụ ọgụgụ nke mmeghachi omume gas na-abawanye nke ukwuu, mpaghara mkpuchi ogige na-abawanye.Ma ọ bụrụ na a pụghị imezigharị mmeghachi omume gas na-agba ọsọ n'oge, a naghị egbochi ọnụ ọgụgụ nke mpaghara mkpuchi mkpuchi, na ọwa sputtering ga-anọgide na-ekpuchi ya site na ogige ahụ, mgbe ihe mgbaru ọsọ na-ekpuchi ya nke ọma, ihe mgbaru ọsọ bụ. kpamkpam nsi.

3, Ihe nsi nsi ebum n’obi
(1) Nchikota ion dị mma: mgbe ihe na-egbu egbu, a ga-emepụta oyi akwa nke ihe nkiri na-ekpuchi ihe n'elu ebe a na-eche ihu, ion dị mma na-erute elu nke cathode lekwasịrị anya n'ihi nkwụsị nke mkpuchi mkpuchi.Ọ bụghị ozugbo banye cathode lekwasịrị anya elu, ma imubanye na lekwasịrị n'elu, mfe na-emepụta oyi ubi ka arc ihapu - arcing, nke mere na cathode sputtering enweghị ike ịga n'ihu.
(2) anode efu: mgbe lekwasịrị nsi, grounded agụụ ụlọ mgbidi nakwa edebe insulating film, na-eru na anode electrons enweghị ike ịbanye anode, guzobe anode efu onu.

4, Nkọwa anụ ahụ nke nsi lekwasịrị anya
(1) N'izugbe, ọnụọgụ electron emission nke abụọ nke ogige metal dị elu karịa nke ọla.Mgbe nsi e lekwasịrị anya, elu nke ebumnuche bụ ogige ọla niile, na mgbe ion gbasasịrị ya, ọnụ ọgụgụ nke electrons nke abụọ ewepụtara na-abawanye, nke na-eme ka nrụpụta nke oghere dị mma ma belata impedance plasma, na-eduga na voltaji sputtering dị ala.Nke a na-ebelata ọnụego sputtering.N'ozuzu, voltaji na-agbapụ nke magnetron sputtering dị n'etiti 400V-600V, na mgbe nsi e lekwasịrị anya na-eme, voltaji na-agbapụ na-ebelata nke ukwuu.
(2) Metal target na compound target mbụ sputtering ọnụego dị iche iche, n'ozuzu sputtering ọnụọgụ nke metal dị elu karịa sputtering ọnụọgụ nke compound, otú sputtering ọnụego bụ ala mgbe lekwasịrị nsi.
(3) The sputtering arụmọrụ nke reactive sputtering gas bụ mbụ ala karịa sputtering arụmọrụ nke inert gas, ya mere, keukwu sputtering ọnụego ebelata mgbe nkezi nke reactive gas na-abawanye.

5, Ngwọta maka nsi lekwasịrị anya
(1) Nabata ọkụ ọkụ nke ọkara ma ọ bụ ọkọnọ ike ugboro redio.
(2) Nabata njikwa mechiri emechi nke ntinye gas mmeghachi omume.
(3) Nabata ebumnuche ejima
(4) Jikwaa mgbanwe nke mkpuchi mkpuchi: Tupu mkpuchi, a na-anakọta usoro mmetụta hysteresis nke nsi lekwasịrị anya ka a na-achịkwa ikuku ikuku n'ihu n'ihu imepụta nsị iji hụ na usoro ahụ na-adị mgbe niile na ọnọdụ tupu ntinye ego. ọnụego na-agbada nke ukwuu.

-A na-ebipụta akụkọ a site na Guangdong Zhenhua Technology, onye na-emepụta ngwá ọrụ mkpuchi agụụ.