Nkemkpuchi agụụA na-ekewa usoro igwe n'ime: mkpuchi ikuku evaporation, mkpuchi na-ekpochapụ agụụ na mkpuchi ion.
1, Vacuum evaporation mkpuchi
N'okpuru agụụ ọnọdụ, mee ka ihe evaporated, dị ka metal, metal alloy, wdg wee tinye ha na mkpụrụ n'elu, na evaporation mkpuchi usoro na-ejikarị na-eguzogide kpo oku, na mgbe ahụ, electron doo bombardment nke mkpuchi ihe, mee ka ha. kpochapuru n'ime oge gas, tinyezie ya n'elu ala, n'akụkọ ihe mere eme, ntinye oghere ikuku bụ teknụzụ mbụ ejiri na usoro PVD.
2, mkpuchi mkpuchi
A na-edobe gas ahụ na-enwu gbaa n'okpuru ọnọdụ oghere (Ar) jupụtara n'oge a, argon (Ar) atoms ion n'ime ion nitrogen (Ar), ion na-eme ka ike eletrik na-eme ka ion ahụ dịkwuo elu, ma na-atụ egwu cathode lekwasịrị anya. A na-eji ihe mkpuchi ahụ mee ihe, a ga-awụpụ ihe ahụ ma tinye ya n'elu mkpụrụ ihe ion ihe na-eme na mkpuchi sputter, nke a na-enwetakarị site na nkwụsị ọkụ, dị na 10-2pa ruo 10Pa na gas ụmụ irighiri ihe na agụụ ụlọ mgbe ofufe kwupụta mkpụrụ, na-eme ka ngagharị direction random na edebe ihe nkiri mfe ịbụ edo.
3, ion mkpuchi
N'okpuru ọnọdụ agụụ, N'okpuru ọnọdụ agụụ, a na-eji usoro ionization plasma ụfọdụ ionise ihe mkpuchi ihe atom n'ime ion. na-edebe n'elu mkpụrụ n'okpuru a miri emi adịghị mma elere anya na-etolite a mkpa nkiri.
Oge nzipu: Mar-23-2023