Ion beam nyere aka na teknụzụ nkwụnye ego

N'ezie, teknụzụ ntinye ntinye aka nke Ion beam bụ teknụzụ jikọtara ọnụ.Ọ bụ usoro ọgwụgwọ ion n'elu jikọtara ọnụ na-ejikọta ntinye ion na teknụzụ ihe nkiri ihe nkiri nke vepo anụ ahụ, yana ụdị usoro njikarịcha elu ion beam.Na mgbakwunye na uru nke anụ ahụ vepor deposition, usoro a nwere ike na-aga n'ihu na-eto eto ọ bụla ọkpụrụkpụ film n'okpuru ọzọ stringent akara ọnọdụ, melite crystallinity na nghazi nke ihe nkiri oyi akwa ọzọ nke ukwuu, dịkwuo adhesion ike nke ihe nkiri oyi akwa / substrate, melite denseness. nke ihe nkiri oyi akwa, na synthesize compound films na ezigbo stoichiometric ratios na nso ụlọ okpomọkụ, gụnyere ọhụrụ ụdị fim na-enweghị ike nweta na ụlọ okpomọkụ na nrụgide.Ion beam na-enyere aka nkwụnye ego ọ bụghị nanị na-ejigide uru nke usoro ntinye ion, ma ọ pụkwara ikpuchi mkpụrụ ahụ na ihe nkiri dị iche na nke mkpụrụ.
N'ụdị ọ bụla nke ikuku anụ ahụ na ntinye mmiri kemịkalụ, enwere ike ịgbakwunye egbe ogbunigwe inyeaka iji mepụta usoro IBAD, yana usoro IBAD izugbe abụọ dị ka ndị a, dị ka egosiri na foto a:

Dị ka e gosiri na foto (a), ihe eletrọn doo evaporation isi iyi na-eji irradiate ihe nkiri oyi akwa na ion doo emipụtara si ion egbe, si otú a na-aghọta ion beam enyemaka ntinye.Uru ya bụ na enwere ike ịhazigharị ike ion beam na ntụziaka, ma ọ bụ naanị otu ma ọ bụ obere alloy, ma ọ bụ ihe nwere ike iji mee ihe dị ka isi iyi evaporation, na nrụgide vapor ọ bụla nke akụkụ alloy na compound dị iche, nke na-eme ka ọ sie ike. inweta ihe nkiri oyi akwa nke mbụ evaporation isi iyi mejupụtara.
Foto (b) na-egosi ntinye aka nke ion beam sputtering-enyere aka, nke a makwaara dị ka okpukpu abụọ nke ion beam sputtering deposition, nke ezubere iche nke ion beam sputtering ihe mkpuchi, a na-eji ngwaahịa ndị na-agbapụta ihe dị ka isi iyi.Mgbe a na-etinye ya na mkpụrụ, ion beam sputtering enyemaka ntinye aka na-enweta site na irradiation na isi iyi ion ọzọ.Uru nke usoro a bụ na ihe ndị a na-agbapụta n'onwe ha nwere ike ụfọdụ, n'ihi ya, ọ ka mma mmachi na mkpụrụ;ihe ọ bụla akụrụngwa nke lekwasịrị nwere ike sputtered mkpuchi, ma nwekwara ike ịbụ mmeghachi omume sputtering n'ime fim, mfe ịgbanwe mejupụtara nke film, ma ya deposition arụmọrụ dị ala, lekwasịrị dị oké ọnụ na e nwere nsogbu ndị dị otú ahụ dị ka sputtering nhọrọ.