Ngwa mkpuchi ihe mejupụtara magnetron sputtering na mkpuchi cathodic multi-arc ion nwere ike ịrụ ọrụ iche iche na n'otu oge;enwere ike idobe ya ma kwadebe ihe nkiri igwe dị ọcha, ihe nkiri ngwakọta metal ma ọ bụ ihe nkiri mejupụtara;nwere ike ịbụ otu oyi akwa nke ihe nkiri na ihe nkiri multi-layer composite film.
Uru ya dị ka ndị a:
Ọ bụghị naanị na-ejikọta uru nke mkpuchi ion dị iche iche ma na-eburu n'uche nkwadebe na ntinye nke ihe nkiri dị mkpa maka mpaghara dị iche iche nke ngwa, ma na-enye ohere ntinye na nkwadebe nke ihe nkiri monolithic multi-layer ma ọ bụ ihe nkiri multi-layer composite na otu oghere. mkpuchi ụlọ n'otu oge.
Ngwa nke echekwabara ihe nkiri n'ígwé na-ọtụtụ ebe na-eji teknụzụ ya dị iche iche ụdị , ndị na-ahụkarị dị ka ndị a:
(1) Ngwakọta nke na-abụghị nha nha magnetron sputtering na kathodic ion plating technology.
Egosiri ngwaọrụ ya dị ka ndị a.Ọ bụ ngwá ọrụ mkpuchi ihe nke columnar magnetron lekwasịrị anya na mkpuchi cathodic arc ion planar, nke kwesịrị ekwesị maka ihe nkiri mkpuchi ihe eji eme ihe na mkpuchi ihe nkiri ịchọ mma.Maka mkpuchi ngwá ọrụ, a na-eji mkpuchi cathodic arc ion mbụ mee ihe maka mkpuchi oyi akwa, mgbe ahụ, a na-eji kọlụm magnetron lekwasịrị anya maka ntinye nke nitride na ihe nkiri ihe nkiri ndị ọzọ iji nweta ihe nkiri dị elu nke nhazi ngwá ọrụ dị elu.
Maka mkpuchi ịchọ mma, TiN na ZrN ihe nkiri ihe eji achọ mma nwere ike idobe ya site na mkpuchi cathodic arc nke mbụ, wee tinye ya na metal site na iji ebumnuche magnetron, na mmetụta doping dị ezigbo mma.
(2) Ngwakọta nke ejima ụgbọ elu magnetron na kọlụm cathode arc ion mkpuchi usoro.Egosiri ngwaọrụ dị ka ndị a.Ọ na-eji elu ejima lekwasịrị nkà na ụzụ, mgbe abụọ n'akụkụ-site-n'akụkụ ejima zaa jikọtara na-ajụ ugboro ike ọkọnọ, ọ bụghị nanị na-emeri lekwasịrị nsi nke DC sputtering, ọkụ na ndị ọzọ drawbacks;ma nwee ike itinye ego Al203, SiO2 oxide quality film, nke mere na nguzogide oxidation nke akụkụ ndị a na-ekpuchi amụbawo ma dị mma.Columnar multi-arc lekwasịrị arụnyere n'etiti oghere oghere, e nwere ike iji ihe lekwasịrị anya Ti na Zr, ọ bụghị nanị iji nọgide na-enwe uru nke elu multi-arc dissociation ọnụego, deposition ọnụego, ma nwekwara ike n'ụzọ dị irè belata " droplets "na. usoro nke obere ụgbọ elu multi-arc lekwasịrị anya nkwụnye ego, nwere ike idobe na kwadebe a ala porosity nke metal fim, compound film.Ọ bụrụ na-eji Al na Si dị ka ihe ebumnuche maka ejima planar magnetron lekwasịrị anya na mpụta, Al203 ma ọ bụ Si0 metal-seramiiki ihe nkiri nwere ike idobe na kwadebere.Na mgbakwunye, enwere ike itinye ọtụtụ obere ụgbọ elu nke isi iyi evaporation multi-arc na mpụta, yana ihe ebumnuche ya nwere ike ịbụ Cr ma ọ bụ Ni, enwere ike idobe ihe nkiri igwe na ihe nkiri multilayer mejupụtara ma kwadebe ya.Ya mere, teknụzụ mkpuchi a na-ejikọta ọnụ bụ nkà na ụzụ mkpuchi nke nwere ọtụtụ ngwa.
Oge nzipu: Nov-08-2022