Ntube ikuku kemịkalụ na-ekpo ọkụ

N'ozuzu, mmeghachi omume CVD na-adabere na okpomọkụ dị elu, ya mere a na-akpọ ya kemịkalụ vapor deposition (TCVD).Ọ na-ejikarị precursors inorganic eme ya na mgbidi na-ekpo ọkụ na mgbidi oyi.Ụzọ ya na-ekpo ọkụ gụnyere ọkụ ọkụ redio (RF), kpo oku infrared, ikpo ọkụ na-eguzogide, wdg.

Ntụkwasị mmiri kemịkalụ mgbidi na-ekpo ọkụ
N'ezie, reactor kemịkalụ kemịkalụ na-ekpo ọkụ na-ekpo ọkụ bụ ọkụ na-ekpo ọkụ, nke a na-ejikarị ihe ndị na-eguzogide ekpo ọkụ, maka mmepụta oge.E gosipụtara ebe a na-emepụta ihe nrụpụta kemịkalụ kemịkalụ na-ekpo ọkụ maka mkpuchi ngwa mgbawa dị ka ndị a.Ntube mmiri kemịkalụ a na-ekpo ọkụ nwere ike kpuchie TiN, TiC, TiCN na ihe nkiri ndị ọzọ dị gịrịgịrị.Enwere ike ịmepụta reactor ka ọ buru ibu wee jide ọnụ ọgụgụ dị ukwuu nke components, na ọnọdụ nwere ike ịchịkwa ya kpọmkwem maka ntinye ego.Foto 1 na-egosi ngwaọrụ oyi akwa epitaxial maka silicon doping nke mmepụta ngwaọrụ semiconductor.A na-etinye mkpụrụ n'ime ọkụ ahụ n'ụzọ kwụ ọtọ iji belata mmetọ nke elu ahụ site na irighiri ihe, ma na-abawanye mmepụta mmepụta.Igwe ọkụ na-ekpo ọkụ maka mmepụta semiconductor na-arụkarị ọrụ na nrụgide dị ala.