The equipment integrates magnetron sputtering and resistance evaporation technology, and provides a solution for coating a variety of different substrates.
The experimental coating equipment is mainly used in universities and scientific research institutions, and can meet a variety of experimental requirements. Various structural targets are reserved for the equipment, which can be flexibly configured to meet the scientific research and development in different fields. Magnetron sputtering system, cathode arc system, electron beam evaporation system, resistance evaporation system, CVD, PECVD, ion source, bias system, heating system, three-dimensional fixture, etc. can be selected. Customers can select according to their different needs.
The equipment has the characteristics of beautiful appearance, compact structure, small floor area, high degree of automation, simple and flexible operation, stable performance and easy maintenance.
The equipment can be applied to plastic, stainless steel, electroplated hardware / plastic parts, glass, ceramics and other materials. Simple metal layers such as titanium, chromium, silver, copper, aluminum or metal compound films such as TiN / TiCN / TiC / TiO2 / TiAlN / CrN / ZrN / CrC can be prepared.
ZCL0506 | ZCL0608 | ZCL0810 |
φ500*H600(mm) | φ600*H800(mm) | φ800*H1000(mm) |