Ko te tukanga o te paninga katote hollow cathode e whai ake nei:
1, Kuhua nga ingots Chin ki te tiango.
2, Whakapuru i te mea mahi.
3、I muri i te rerenga ki te 5 × 10-3Pa, ka whakauruhia te hau argon ki roto i te ruma paninga mai i te ngongo hiriwa, a ko te taumata korehau kei te 100Pa.
4, Whakakāhia te mana rītaha.
5、I muri i te hurihanga o te mana arc ki te mura i te tukunga o te cathode hollow.Ko te tukunga maramara ka hangaia i roto i te ngongo paatene,Ko te ngaohiko tuku he 800~1000V,Ko te 30~50A.Due ki te paanga cathode tuwhera o te kanapa. te tukunga, Te nui o te mura o te rere kiato o naianei, Ko te kiato nui o nga katote kiore i roto i te ngongo hiriwa e pupuhi ana i te pakitara o te ngongo teitei, Kia tere te whakamahana o te pakitara ngongo ki te tukunga o te rere irahiko, te aratau tukunga mai i te rere o te kanapa ka huri ohorere ki te te tukunga arc,Ko te Ngaohiko he 40~70V,Ko te 80~300A.Ko te wera o te ngongo hiriwa ka eke ki runga ake i te 2300K,Whakaahua,Ka tukuna he awa kiato teitei o nga irahiko arc mai i te ngongo, ka pana ki te anode.
6、Whakatikanga o te taumata korehau.Ko te taumata korehau mo te rere o te mura mai i te pu cathode hollow he tata ki te 100 Pa,A ko te tohu whakakikorua o te paninga he 8×10-1~2Pa.Na reira, I muri i te mura o te rere arc,Whakaitihia te argon taumai hau i te wa ka taea, Whakaritea te taumata korehau ki te awhe e tika ana mo te paninga.
7、Titanium whakakikoruatia paparanga turanga.Ka rere irahiko ki runga anodically tiango ingot konganuku Chin,Te hurihanga o te pūngao neke ki te pūngao waiariki,Te whakaetonga o te konganuku Chin mā te whakawera,Ko ngota ngota ka tae ki te mahi ki te hanga i te kiriata Titanium.
8、Deposition o TiN.Nitrogen hau ka tukuna ki te ruuma paninga,Nitrogen hau me ngota ngota kua katote ki te hauota me te titanium ions.Above te crucible,Higner tūponotanga o inelastic collisions o Titanium kohu ngota ki te awa mātotoru o iti-pūngao irahiko, Ko te reiti wehewehe whakarewa he nui ki te 20% ~ 40%., Ko nga katote Titanium he nui ake te tauhohenga matū me te hauota hau tauhohenga, Whakapae ki te whiwhi i te paparanga kiriata koroka nitride.Ko te pu cathode hollow he puna whakangohutanga ， Ko tetahi atu puna o te ionization.I te wa o te whakakikoruatanga,Me whakatika ano te naianei o te hiko hiko huri noa i te parapara,Whakaarohia te kurupae irahiko ki te pokapu o te tiango,Na, ka piki te kaha o te rere irahiko.
9、Power Off.After tae te matotoru kiriata ki te matotoru kiriata whakaritea o mua, Whakawetohia arc supply mana、Bias supply mana me te supply rangi.
Wā tuku: Hūrae-08-2023