1.Characteristics of arc light electron flow
The density of electron flow, ion flow, and high-energy neutral atoms in arc plasma generated by arc discharge is much higher than that of glow discharge. There are more gas ions and metal ions ionized, excited high-energy atoms, and various active groups in the coating space, which play an important role in the heating, cleaning, and coating stages of the coating process. The action form of arc electron flow is different from that of ion beam, not all of which converge into a “beam”, but mostly in a divergent state, so it is called arc electron flow. Because arc electrons flow towards the anode, the arc electron flow is directed wherever the positive electrode of the arc power supply is connected, and the anode can be a workpiece, auxiliary anode, crucible, etc.
2.Method of generating arc electron flow
(1) The gas source generates arc electron flow: the arc current of hollow cathode arc discharge and hot wire arc discharge can reach about 200A, and the arc voltage is 50-70V.
(2) Solid source generates arc electron flow: cathode arc source, including small arc source, cylindrical arc source, rectangular plane large arc source, etc. The arc current of each cathode arc source discharge is 80-200A, and the arc voltage is 18-25V.
The high-density and low-energy arc electron flow in two types of arc discharge plasmas can generate intense collision ionization with gas and metal film atoms, obtaining more gas ions, metal ions, and various high-energy active atoms and groups, thereby improving the overall activity of the film layer ions.
–This article was released by Guangdong Zhenhua, a vacuum coating machine manufacturer
Post time: May-31-2023