1. Hollow cathode ion coating machine and hot wire arc ion coating machine
The hollow cathode gun and hot wire arc gun are installed at the top of the coating chamber, the anode is installed at the bottom, and two electromagnetic coils are installed at the top and bottom of the coating chamber periphery. Arc light electron flow from the top to the bottom to do spiral line movement.
2. Permanent magnet plus electromagnetic control of the small circular cathode arc source
The electromagnetic coil accelerates the arc spot to do rotary movement in the circumference of the target, which reduces the residence time of the arc spot on the target surface, decreases the area of the molten pool and refines the film layer organization.
3.Dual electromagnetic control cathodic arc source
The cathodic arc source is equipped with two electromagnetic coils, which improves the rotational speed of electron flow and refines the film layer organization.
4.Magnetron Cyclotron PECVD
Two electromagnetic coils are installed outside the DC PECVD coating chamber to make the electrons rotate, which increases the probability of collision between the electrons and the gas, and improves the dissociation rate of the particles in the film layer.
5.ECR Microwave PECVD
In the coating chamber outside the installed the upper and lower with two electromagnetic coils, can improve the dissociation rate.
6.Arc Light Discharge PECVD
In the arc discharge PECVD equipment coating chamber around the upper and lower installation of two electromagnetic coils, deposition of diamond film, the coaxial electromagnetic field can be rotated arc electron flow to stimulate the gas ionization of hydrocarbons.
–This article is released by vacuum coating machine manufacturer Guangdong Zhenhua
Post time: Oct-24-2023