Process Flow of Sputtering Coating Machine

1. Bombardment cleaning substrate

1.1) Sputtering coating machine use glow discharge to clean the substrate.  That is to say, charge the argon gas into the chamber,discharge voltage is around 1000V, After turning on the power supply, a glow discharge is generated, and the substrate is cleaned by argon ion bombardment.

1.2) In sputtering coating machines that industrially produce high-end ornaments, titanium ions emitted by small arc sources are mostly used for cleaning. The sputtering coating machine is equipped with a small arc source, and the titanium ion stream in the arc plasma generated by the small arc source discharge is used to bombard and clean the substrate.

2. Titanium nitride coating

When depositing titanium nitride thin films, the target material for sputtering is titanium target. The target material is connected to the negative electrode of the sputtering power supply, and the target voltage is 400~500V; The argon flux is fixed, and the control vacuum is (3~8) x10^-1PA. The substrate is connected to the negative electrode of the bias power supply, with a voltage of 100~200V.

After turning on the power supply of the sputtering titanium target, a glow discharge is generated, and high-energy argon ions bombard the sputtering target, sputtering titanium atoms from the target.

The reaction gas nitrogen is introduced, and the titanium atoms and nitrogen are ionized into titanium ions and nitrogen ions in the coating chamber. Under the attraction of the negative bias electric field applied to the substrate, titanium ions and nitrogen ions accelerate to the surface of the substrate for chemical reaction and deposition to form a titanium nitride film layer.

3. Take out the substrate

After reaching the predetermined film thickness, turn off the sputtering power supply, substrate bias power supply, and air source. After the substrate temperature is lower than 120 ℃, fill the coating chamber with air and take out the substrate.

This article is published by magnetron sputtering coating machine manufacturer – Guangdong Zhenhua.